Preparation method of reaction sintered silicon carbide cantilever paddle

Abstract

The invention discloses a preparation method of reaction sintered silicon carbide cantilever paddle, and belongs to the technical field of silicon carbide cantilever paddle. The preparation method comprises the steps as follows: preparing an extrusion forming mould of a silicon carbide cantilever paddle fixing region; extruding a pipe blank in the fixing region and segmentally cutting the pipe blank; drying the cut pipe blanks in the fixing region; preparing ramming forming moulds of a silicon carbide cantilever paddle transition region and a load region; preparing integral blank bodies in the transition region and the load region; drying the integral blank bodies in the transition region and the load region; trimming biscuits; bonding the pipe blanks in the fixing region with the integral blank bodies in the transition region and the load region to finish preparation of a blank body of the silicon carbide cantilever paddle; sintering. Compared with a conventional slip casting process, for the method disclosed by the invention, the blank body forming rate is increased and the preparation cost is saved through using a bonding combination structure; the process is simple, the finished product rate is high, and the prepared silicon carbide cantilever paddle is high in strength, pore-free, good in heat conductivity, resistant to acid and base corrosion, pollution-free at a high temperature, deformation-free, large in load capacity and long in service life.

Description

technical field [0001] The invention belongs to the technical field of silicon carbide cantilever paddles, and in particular relates to a manufacturing method of reaction sintered silicon carbide cantilever paddles. Background technique [0002] Wafer refers to the silicon wafer used in the production of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer; it can be processed into various circuit element structures on the silicon wafer and become a semiconductor with specific electrical functions. Component products. [0003] The raw material of the wafer is silicon, the silicon element is purified to make high-purity polysilicon, and then the polysilicon is melted, and the seed crystal is planted in the melt, and then slowly pulled out to form a cylindrical single crystal silicon crystal After cutting, rolling, slicing, chamfering, polishing, laser engraving, and packaging, silicon crystal rods become the basic raw materials of in...

AI Technical Summary

Problems solved by technology

[0007] The technical problem to be solved by the present invention is to provide a method for manufacturing reaction sintered silicon carbide cantilever paddles, so as to solve the technical problems of low pass rate and high manufacturing cost of the existing silicon carbide cantilever paddles

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