Optical parameter detection method of low-radiation coated glass

Abstract

The invention relates to an optical parameter detection method of low-radiation coated glass, wherein the low-radiation coated glass is SnO2:F / SiCxOy, 0<x<1, and 1<y<4. The invention belongs to a coated glass detection field. On basis of obtaining a spectroscopic ellipsometry of SnO2:F / SiCxOy energy saving coated glass, the method introduces a five-layer film structure and an optical dispersion equation, returns an actually-measured spectroscopic ellipsometry by iteration, and finally obtains a film structure of the SnO2:F / SiCxOy coated glass and optical parameters of each layer. By the method, on-line real time monitor of optical performances of the coated glass can be implemented. The method can obtain an accurate film structure and the optical parameters only by optical test means, has advantages of no damage on a sample, small time consuming for measuring, simple measuring method, and no special requirement on a sample surface to be measured, and is very suitable for performance detection of the SnO2:F / SiCxOy energy saving coated glass.

Description

technical field [0001] The present invention relates to a kind of SnO 2 :F / SiC x o y The invention discloses a fast detection method for the film layer structure and optical parameters of energy-saving coated glass, which belongs to the detection field of energy-saving coated glass. Background technique [0002] Low-radiation energy-saving coated glass is a kind of energy-saving coated glass that has been widely used. It obtains a small glass heat transfer coefficient by improving the reflectivity of mid-to-far infrared radiation, and reduces the heat dissipation of indoor heating to outdoor infrared radiation in winter and reduces heating energy consumption. . SnO 2 :F coated glass is such a low-emissivity coated glass with excellent performance. At present, coating on float glass by atmospheric pressure chemical vapor deposition method is the best way to prepare SnO 2 : An important means of F-coated glass, but the alkali metal ions from the float glass substrate can...

AI Technical Summary

Problems solved by technology

Due to the surface roughness of the film layer and the limitations of the coating method itself, it is difficult to obtain a structure with a steep film interface at each interface in the film, that is, complex multi-layer film interference and depolarization effects will occur; and the silicon-based barrier layer It is very similar to the substrate glass in terms of composition and refractive index. It is difficult to obtain the fine structure and optical parameters of the composite film by conventional measurement methods, which makes it difficult to detect and design the real structure of the film system and the overall optical properties of the film.

Although the method of obtaining the optical parameters of the film based on the fitting of the transmission and reflection spectra (ZL200610053955.9, a method for measuring the optical parameters of the coated glass film) preliminarily solved the problem of rapid detection of the film structure of the coated glass, but this invention will The multilayer film structure is assumed to be a steep interface, which is inconsistent with the actual situation, so there is still a certain deviation in the detection

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