Large immersion type ring polishing machine

Abstract

A large immersion type ring polishing machine mainly comprises a marble polishing disc, a large liquid storage groove, a polishing solution storage tank, a magnetic stirrer, an electric pump, a polishing solution filtering device, a spraying nozzle device and the like. The magnetic stirrer is arranged in the polishing solution storage tank and performs continuous stirring. The polishing solution filtering device adopts a multilayer filtering film type filtering device and can perform multilayer grading filtering according to needs. By means of the large immersion type ring polishing machine, immersion type polishing processing of the large immersion type ring polishing machine is achieved, temperature balance performance is good, polishing surface shape errors caused by uneven polishing temperature are reduced, surface shape precision and surface roughness of a large-caliber plane optical element are improved, and surface defects of elements can be effectively controlled. Furthermore, the immersion type ring polishing machine adopts a mode of cyclic utilization of polishing solution, so that consume of the polishing solution can be greatly reduced, and processing cost is reduced.

Description

technical field [0001] The invention relates to optical element surface or wafer polishing equipment in microelectronics, especially a large ring polishing machine for precision polishing the surface of large-scale optical glass components, especially for plane optics with high surface shape accuracy and surface roughness in the ring polishing process. Component processing. Background technique [0002] Ring polishing machine is almost the only large-caliber, global planar optical element processing technology in the world at present. It rotates the workpiece to be polished relative to the polishing rubber disc under a certain pressure and the presence of polishing liquid. The mechanical grinding action and the corrosive action of chemical oxidants complete the material removal on the surface of the workpiece and obtain a smooth surface. Compared with other technologies, this technology can simultaneously achieve local and global planarization of large-diameter workpieces, ...

AI Technical Summary

Problems solved by technology

This has not only caused a lot of waste, increased production costs, but also caused greater pollution to the surrounding environment.

According to statistics, the daily consumption of polishing fluid for a ring polishing machine is about 2,000 yuan, which is not conducive to the long-term and sustainable development requirements of this field.

In addition, the traditional manual operation method of adding polishing liquid relies heavily on the experience of workers, lacks long-term stability and controllability, is not conducive to real-time monitoring and testing of polishing liquid, and has a low degree of standardization

Finally, the diameter of modern large-scale ring polishing machines is often more than 4m. Simply relying on manual methods lacks an overall grasp of the polishing rubber disc, which is likely to cause unstable addition of polishing fluid and uneven grinding of workpieces. The efficiency is low, and the deterministic processing of polishing cannot be realized

[0004] Most of the current large-scale ring polishing machines are non-immersed polishing, and the polishing powder is added manually, which not only causes a lot of waste, but also causes certain harm to workers and the environment; in addition, although some units have realized immersion Processing method, but simply immersing the workpiece in the polishing liquid, without further filtering and refining the polishing liquid, the polishing effect is poor, and the advantages of the immersion polishing method cannot be reflected

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