Temperature control and energy saving system and process for polycrystalline silicon reduction furnaces
An energy-saving system and reduction furnace technology, applied in the field of solar photovoltaic, can solve the problems such as the inability to effectively remove the silicon powder in the tail gas pipeline, the untimely control of the feed flow of trichlorosilane, and the insufficient utilization of thermal energy. The effect of stable and controllable, reducing energy consumption and reducing the use of steam
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Embodiment 1
[0059] Example 1: The temperature control and energy-saving system for a polysilicon reduction furnace of the present invention includes a trichlorosilane centralized vaporizer 1, a hydrogen preheater 2, a pipeline static mixer 3, a reduction furnace 4, a silicon powder filter 5, and exhaust gas temperature control cooling 器6. The hot hydrogen outlet of the hydrogen preheater 2 tube side is connected to the pipeline static mixer 3, and the gas phase trichlorosilane outlet of the trichlorosilane centralized vaporizer 1 is connected to the hydrogen preheater 2 tube side The hot hydrogen outlet pipe is the smallest distance from the pipeline static mixer 3; the mixed gas outlet of the pipeline static mixer 3 is connected to the air inlet of the reduction furnace 4; the exhaust gas outlet of the reduction furnace 4 is connected to the silicon The inlet of the powder filter 5, the outlet of the silicon powder filter 5 is connected to the shell side high temperature gas phase inlet of...
Embodiment 2
[0060] Embodiment 2: In a further improvement of this embodiment 1, a centralized flash tank 7 is also included. The centralized flash tank 7 has a furnace barrel cooling water outlet connected to the reduction furnace 4 furnace barrel cooling water inlet, and the reduction furnace 4 The furnace barrel cooling water outlet is connected to the centralized flash tank 7 furnace barrel cooling water return water inlet and the trichlorosilane centralized vaporizer 1 pipe pass inlet, and the trichlorosilane centralized vaporizer 1 pipe pass outlet is connected to the centralized vaporizer The flash tank 7 vaporizer return water inlet, the exhaust gas cooling water outlet of the centralized flash tank 7 is connected to the exhaust gas temperature control cooler 6 pipe pass inlet, and the exhaust gas temperature control cooler 6 pipe pass outlet is connected to the centralized flash tank 7 The exhaust cooling water return inlet.
[0061] The specific implementation method is that the tri...
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