Optical-fiber micro-electro-mechanical hydrophone and production method thereof

Abstract

The invention relates to an optical-fiber micro-electro-mechanical hydrophone and a production method thereof. The optical-fiber micro-electro-mechanical hydrophone comprises a silicon-based MEMS (micro electro mechanical system) sound pressure sensing microstructure and an optical fiber pigtail, the silicon-based MEMS sound pressure sending microstructure comprises a silicon oxide sensing film and a silicon-based pigtail clamping groove structure, a pigtail is clamped with the sensing microstructure through the silicon-based pigtail clamping groove structure, and the end face of the pigtail and the silicon oxide sensing film form a Fabry-Perot interference system so as to sense and monitor sound pressure signals. The production method includes forming a circular groove, with the silicon oxide sensing film as the bottom surface, through a reactive ion etching process in the back of a silicon chip with the front grown with the silicon oxide sensing film and a silicon nitride film, adopting an oxygen plasma cleaning process for removing a passivation layer on the side wall of the circular groove, then using the reactive ion etching process for etching to form the pigtail clamping groove structure, inserting the pigtail into the pigtail clamping groove structure through a precise mechanical adjustment device, and then using epoxy resin adhesive for adhesion and fixation.

Description

technical field [0001] The invention belongs to the technical field of optical fiber sensors, and in particular relates to an optical fiber hydrophone designed by adopting micro-electromechanical system technology and a manufacturing method thereof. Background technique [0002] Optical fiber hydrophone is an underwater acoustic signal sensor that uses optical fiber as the sensing unit and signal transmission carrier. It uses acoustic waves to modulate the intensity, polarization, phase and other parameters of light waves in optical fibers to obtain information such as frequency and intensity of acoustic waves. Compared with traditional piezoelectric hydrophones, fiber optic hydrophones have the advantages of high sensitivity, wide frequency band, light weight, no electromagnetic interference, smart structure, can be designed into any shape, long transmission distance and easy to reuse. [0003] In view of the above technical characteristics, fiber optic hydrophones have sig...

AI Technical Summary

Problems solved by technology

At present, the interference fiber optic hydrophone with the sensing fiber wound on the sensitization structure has been widely used, but its size is difficult to further reduce, and it cannot meet the needs of high-frequency sonar arrays with micro-sized fiber optic hydrophones, and ultra-fine types for small UUVs. Line array and other aspects of the demand

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