Sensor based on self-supporting grating structure and preparation method of sensor

A grating structure, self-supporting technology, applied in the field of sensors, can solve the problems of large volume, high price, complex structure, etc., and achieve the effects of high sensitivity, easy portability, and small device structure.

Inactive Publication Date: 2014-01-29
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

The main advantage of the infrared absorption spectrum sensor is that it can measure almost all gases. The main disadvantage is that it is large in si

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  • Sensor based on self-supporting grating structure and preparation method of sensor
  • Sensor based on self-supporting grating structure and preparation method of sensor
  • Sensor based on self-supporting grating structure and preparation method of sensor

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Embodiment Construction

[0033] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0034] The invention discloses a sensor based on a self-supporting grating structure and a preparation method thereof. The sensor includes: a self-supporting dielectric grating; and a metal grating formed on the dielectric grating; wherein the sensor uses the transmission absorption peak generated by the guided wave resonance induced by the metal grating and the dielectric grating under the irradiation of a plane wave to detect The change in the refractive index of the sample to be measured.

[0035] Wherein, both the dielectric grating and the metal grating are periodic one-dimensional grating structures, and their periods are between 500 nanometers and 5 micrometers. The metal grating is made on the dielectric grating,...

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Abstract

The invention discloses a sensor based on a self-supporting grating structure. The sensor comprises a self-supporting dielectric grating, and a metal grating formed on the dielectric grating. The sensor is characterized in that the variation of refractive index of a sample to be detected is detected through a transmission absorption peak produced by the guided wave resonance caused by the metal grating and dielectric grating under the irradiation of a plane wave. The self-supporting grating structure of the sensor is manufactured by the nano processing technology. The variation of the refractive index of the sample to be detected can be detected through the transmission absorption peak produced by the guided wave resonance caused by the metal-dielectric grating under the vertical radiation of a light. The sensor with a periodic nano structure is small in size and easy to carry; the self-supporting grating structure is adopted, so that the manufacture process and the testing method are simple, and the sensitivity is high.

Description

technical field [0001] The invention relates to the technical field of sensors, more specifically, to a sensor based on a self-supporting grating structure and a preparation method thereof. Background technique [0002] Detection of immobilized biochemical components is very important in basic biology and chemistry research, as well as environmental monitoring, medical treatment and national defense security. Sensors that detect immobilized biochemical components (such as enzymes, antibodies, antigens, microorganisms, cells, tissues, nucleic acids, and other biologically active substances) are widely used in biotechnology, environmental monitoring, medical and health, food inspection, and national defense security. [0003] At present, sensors based on surface plasmon resonance (SPR) technology have been widely used and developed rapidly due to their high sensitivity and high efficiency, and are the main tools for characterizing chemical and biomolecular interactions. The b...

Claims

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Application Information

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IPC IPC(8): G01N21/41
Inventor 谢常青洪梅华史丽娜朱效立李海亮刘明
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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