Preparation method of high-purity safe gas source

A safe gas, high-purity technology, applied in the field of preparation of high-purity safe gas sources, can solve the problems of low gas purity and inability to apply, and achieve the effect of simple and stable process, easy control, and obvious cost advantages.

Active Publication Date: 2016-01-06
JIANGSU NATA OPTO ELECTRONICS MATERIAL +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the current products have the following disadvantages: the purity of the gas is not high
Therefore, this technology cannot currently be applied to a wider range of processes

Method used

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Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0018] The preparation method of a high-purity safe gas source is characterized in that: in an inert gas environment, metal or metal precursors are added to a steel cylinder containing an adsorbent; in an inert gas environment or a vacuum environment, by heating the cylinder or changing the mechanical Mixing method, for example, shaking or rolling the steel cylinder to evenly distribute the metal components in the adsorbent, and activate it into a chemically active substance for gas impurities, and fill the steel cylinder with high-purity safe gas after vacuum degassing. Impurities generated during the adsorption process, especially oxygen-containing impurities, are effectively removed by the active material.

[0019] Wherein, the adsorbent is at least one of activated carbon, aluminum oxide, silicon oxide, molecular sieve and porous resin. The metal is Ag, Cu, Cr, Al, K, Na, Li, Pd or Pt, and the metal precursor is Al(CH 3 ) 3 , LiAlH 4 or LiBH 4 . The content of the met...

Embodiment 1

[0021] In a glove box filled with high-purity helium, 2gLiAlH 4 Put it into a 2.2-liter high-pressure steel cylinder, add 1100g of activated carbon that has been treated at greater than 800°C, install the valve of the cylinder and check whether it is sealed, and remove the cylinder from the glove box after confirming that there is no leak, and mix the contents of the cylinder by rolling the cylinder , heat the cylinder to 100°C and use a vacuum pump to evacuate the cylinder to 1x10 -3 mmHg, after the cylinder is cooled, it is connected to the arsine filling device, and the arsine gas is filled into the cylinder. When the cylinder pressure reaches 650mmHg at room temperature of 25°C and there is no significant change in pressure, remove the cylinder from the arsine filling device. Use GC to analyze the gas in the filled cylinder. Oxygen-containing impurities (O 2 , H 2 O) the total concentration is less than 10ppmv. Reanalyzed after leaving the cylinder for 10 days, oxygen...

Embodiment 2

[0023] In a glove box filled with high-purity helium, put 5gLiBH4 into a 2.2-liter high-pressure steel cylinder, add 1100g of activated carbon that has been treated at greater than 800°C, install the cylinder valve and check whether it is sealed. After confirming that there is no leak, move the steel cylinder out of the glove box. Mix the contents of the bottle by rolling the bottle. Heat the cylinder to 150°C and use a vacuum pump to evacuate the cylinder to less than 1x10 -2 mmHg. After the cylinder is cooled, it is connected to the arsine filling device, and the arsine gas is filled into the cylinder. When the cylinder pressure reaches 650mmHg at room temperature of 25°C and there is no significant change in pressure, remove the cylinder from the arsine filling device. Use GC to analyze the gas in the filled cylinder. Oxygen-containing impurities (O 2 , H 2 O) the total concentration is less than 10ppmv. Reanalyzed after leaving the cylinder for 10 days, oxygen-conta...

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PUM

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Abstract

The present invention involves the preparation method of high -purity gas sources. In an inert gas environment, the metal or metal front drive is added to the cylinder equipped with an adsorbent, and in the inert gas environment or vacuum environmentThe adsorbent is activated and activated it into a substance with chemical activity for the gas impurities. After the vacuum is removed, the high pure gas is filled in the cylinder.The craftsmanship is simple and stable, easy to control, and high purification efficiency. Because the metal carrier uses the adsorbent itself, the preparation process is very safe and concise. It can use existing equipment in production safety sources. The cost advantage is obvious, and it is especially suitable for large -scale industrialized production.

Description

technical field [0001] The invention relates to a preparation method of a high-purity safe gas source, which is applied to the preparation and purification of arsine, phosphine and other toxic gases used in the production of semiconductors and other electronic components. Background technique [0002] In the most important processes of large-scale integrated circuit manufacturing, such as ion implantation and chemical deposition, large amounts of arsine (AsH 3 ), phosphine (PH 3 ) and boron trifluoride (BF 3 ) and other gaseous materials. Due to its highly toxic nature and unique method of use, it is necessary to adopt a safe negative pressure packaging technology, that is, a safe gas source SDS? (SafeDeliverySource). The safe gas source is a gas cylinder with adsorbent as the core. Compared with the general high-pressure gas cylinder, its characteristic is that it can maintain the pressure of the cylinder below an atmospheric pressure, that is, negative pressure, while k...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01J19/14B01D53/04
Inventor 王陆平许从应李英辉马潇朱颜王仕华王智
Owner JIANGSU NATA OPTO ELECTRONICS MATERIAL
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