Polycrystalline silicon chip texturing liquid and texturing method

A polycrystalline silicon wafer, texturing liquid technology, applied in chemical instruments and methods, crystal growth, after treatment and other directions, can solve the problems of uneven texture, uneven surface of polycrystalline silicon wafers, black silk and obvious grain boundaries, etc. The effect of texturing speed, reducing surface recombination, and improving cell efficiency

Inactive Publication Date: 2014-03-26
WUXI SUNTECH POWER CO LTD
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Problems solved by technology

[0006] The purpose of the present invention is to provide a kind of polysilicon wafer texturing liquid and texturing method, can effectively solve the polycrystalline silicon wafer surface roughness, Uneven suede surface and obvious problems of black silk and grain boundaries, thus effectively reducing the fragmentation rate of silicon wafers in subsequent processes, effectively reducing surface recombination and improving battery efficiency

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  • Polycrystalline silicon chip texturing liquid and texturing method
  • Polycrystalline silicon chip texturing liquid and texturing method
  • Polycrystalline silicon chip texturing liquid and texturing method

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[0024] specific implementation plan

[0025] The purpose and effects of the present invention will be described in detail below in conjunction with specific embodiments and accompanying drawings.

[0026] see figure 2 , the texturing equipment 1 includes a coating tank 10, a texturing tank 12 and a cleaning tank 14, and the coating tank 10 is provided with a spraying module 100 and a single-side roller 102, and the spraying module 100 is used for silicon wafer 2, the metal catalyst is sprayed on the upper side, and the single-side roller 102 is used to transport the silicon wafer 2; The polycrystalline silicon wafer texturing liquid S of the present invention is placed, and the polycrystalline silicon wafer texturing liquid S includes an oxidizing agent, hydrofluoric acid and a surfactant. Double-side rollers 120 are arranged in the described texturing tank 12 . The texturing tank 12 can be provided with water knives on one or both sides of the double-sided roller 120, and...

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Abstract

The invention provides a polycrystalline silicon chip texturing liquid and a texturing method. The polycrystalline silicon chip texturing liquid in the prior art only contains oxidant and hydrofluoric acid, so that the reaction speed is slow, the area with multiple flaws can be excessively corroded to form the corrosion pit or burrs, the surface of the textured silicon chip is unsmooth, the textured surface is non-uniform, and the silicon chip is easy to break in the subsequent silk printing process. The polycrystalline silicon chip texturing liquid comprises oxidant, hydrofluoric acid and surface active agent. The polycrystalline silicon chip texturing method comprises the steps of firstly providing a texturing device with a texturing trough, placing the polycrystalline silicon chip texturing liquid in the texturing trough, then providing the textured silicon chip, coating the surface of the silicon chip with metal catalyst, and transferring the silicon chip into the texturing trough to be textured in a corrosion manner for 10s to 40s. By adopting the texturing liquid and the texturing method, the texturing speed of the polycrystalline silicon chip is increased, the surface of the polycrystalline silicon chip after being textured is smooth, the textured surface is uniform, the surface has no obvious black silk and crystal interface, so that the breaking rate of the subsequent process can be effectively reduced, the surface compounding is reduced, and the battery efficiency can be improved.

Description

technical field [0001] The invention relates to the field of solar cell manufacturing, in particular to a texturing liquid and a texturing method for polycrystalline silicon wafers. Background technique [0002] Crystalline silicon solar cells still occupy a mainstream position in the photovoltaic industry. In order to increase the anti-reflection of solar cells, that is, to increase their light trapping, in addition to depositing anti-reflection films on the light-receiving surface of solar cells, usually a suede surface is also made on the light-receiving surface , monocrystalline silicon wafers are easy to form a pyramid texture with good anti-reflection effect due to anisotropy during alkali corrosion, and alkali solution is usually used to texture monocrystalline silicon wafers. [0003] There are many kinds of crystal orientations on the surface of polysilicon and they are chaotic and disordered. The alkaline solution with anisotropic corrosion effect cannot form a pyr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B33/10C23F1/24
Inventor 刘桂林吴文娟朱海东
Owner WUXI SUNTECH POWER CO LTD
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