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High-efficiency oblique double-layer optical grating

A high-efficiency, grating technology, applied in the direction of diffraction grating, etc., to achieve stable performance, good uniformity, flexible and convenient use

Active Publication Date: 2014-03-26
杭州光学精密机械研究所
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Problems solved by technology

But as far as we know, so far, no one has achieved a normal incidence-class 1 high-efficiency transmission design for the commonly used 1064 nm wavelength

Method used

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  • High-efficiency oblique double-layer optical grating
  • High-efficiency oblique double-layer optical grating

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Embodiment Construction

[0014] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0015] see first figure 1 , figure 1 It is the geometry structure of the -1-level high-efficiency oblique double-layer grating for vertical incidence of TE polarization with a wavelength of 1064 nanometers in the present invention. In the figure, 1 represents the incident light, 2 represents the outgoing light, and 3 represents the refractive index n 1 =1 uniform area, 4 represents the first grating area (refractive index n r1 ), 5 represents the second grating area (refractive index n r2 ), 6 represents the refractive index n 2 uniform area. d is the grating period, b is the ridge width, h is the grating depth, and θ is the grating tilt angle. The TE polarized incident light corresponds to the vibration direction of the electric field vector perpendicular to the inci...

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Abstract

The invention discloses a high-efficiency oblique double-layer optical grating which is used for vertical incidence of TE polarization light with wave length of 1064nm. First layer materials of the optical grating are quartz, second layer materials are Ta2O5, a base is made of quartz, and the two layers of the optical grating have the same depth. The optical grating cycle of the optical grating is 950-954nm, the ridge width is 441-445nm, the oblique angle is 68-69 degrees, the optical grating total depth is 2046-2050nm, and when vertical incidence of the TE polarization light happens, the transmission light -1 level diffraction efficiency can be higher than 91%. The TE polarization vertical incidence quartz -1-level high-efficiency oblique double-layer optical grating is formed by the fact that an electron beam direct-writing device is combined with a microelectronic deep-etching technology, material taking is convenient, manufacturing cost is low, large-batch production can be achieved, and important practical prospect is achieved.

Description

technical field [0001] The invention relates to a transmission grating, especially a -1-level high-efficiency oblique double-layer grating for vertical incidence of TE polarization with a wavelength of 1064 nanometers. Background technique [0002] Optical deflector is the basic element in the optical system and has important applications in the optical system. It plays an irreplaceable role in optical communication, optical information processing, optical computing, holography and other systems. The traditional optical deflector is expensive due to the complicated process, and the laser damage threshold is not high. The electro-optic crystals that have emerged this year as light deflectors also have disadvantages such as high cost and difficult manufacturing. Fused Silica and Ta 2 o 5 It is an ideal grating material with high optical quality: stable performance, high damage threshold and wide transmission spectrum from deep ultraviolet to far infrared, and the designed ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18
Inventor 周常河李树斌曹红超吴俊刘昆卢炎聪
Owner 杭州光学精密机械研究所
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