High-efficiency low-cost solar cell diffusion technology

A solar cell and diffusion process technology, applied in the field of solar cell diffusion process, can solve problems such as unsatisfactory diffusion resistance uniformity and repeatability, low conversion efficiency of solar cells, long diffusion process time, etc., to reduce internal defects, reduce Process gas cost, effect of reducing diffusion process time

Inactive Publication Date: 2014-03-26
百力达太阳能股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing diffusion process takes a long time and costs high, the uniformity and repeatability of the diffusion resistance are not ideal, the internal defect rate of the silicon wafer is high, and the conversion efficiency of the solar cell is low

Method used

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  • High-efficiency low-cost solar cell diffusion technology
  • High-efficiency low-cost solar cell diffusion technology

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Put P-type polycrystalline raw silicon wafers on the surface for acid velvet, cleaning and drying, then put them into diffusion quartz boats, place 200 silicon wafers in each boat, and then put 2 sets of quartz boats on the boat support of the cantilever paddle of the diffusion furnace Perform the following diffusion process:

[0038] Step 1: Push the silicon wafer loaded into the quartz boat into the diffusion furnace at the set temperature of 730 degrees Celsius, and feed 10000ml / min of large nitrogen.

[0039] Step 2: Immediately after entering the boat process, keep the temperature rising for 300 seconds in a large nitrogen environment, so that the actual temperature reaches 730 degrees Celsius.

[0040] Step 3: Increase the set temperature to 760 degrees Celsius, maintain a large nitrogen environment, and feed 2000ml / min of oxygen for 600 seconds.

[0041] Step 4: Under the large nitrogen environment of 760 degrees Celsius, pass through the phosphorus source to ca...

Embodiment 2

[0054] Put P-type polycrystalline raw silicon wafers into surface acid texture, wash and dry them, then put them into diffusion quartz boats, place 200 silicon wafers in each boat, and then put 2 groups of quartz boats on the boat holders of the cantilever paddles of the diffusion furnace Perform the following diffusion process:

[0055] Step 1: Push the silicon wafer loaded into the quartz boat into the diffusion furnace at the set temperature of 750 degrees Celsius, and feed 15000ml / min of large nitrogen.

[0056] Step 2: Immediately after entering the boat process, keep the temperature rising for 300 seconds in a large nitrogen environment, so that the actual temperature reaches 750 degrees Celsius.

[0057] Step 3: Increase the set temperature to 780 degrees Celsius, maintain a large nitrogen environment, and feed 1000ml / min of oxygen for 600 seconds.

[0058] Step 4: Under the large nitrogen environment of 780 degrees Celsius, pass through the phosphorus source to carry ...

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PUM

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Abstract

The invention provides a high-efficiency low-cost solar cell diffusion technology, which is a multi-step variable temperature diffusion and annealing technology under the protection of small-flow nitrogen, and is characterized by adopting the following eight steps of diffusion processes under the protection of small-flow nitrogen: step 1, ultralow temperature boat entering process; step 2, constant temperature field process; step 3,variable temperature oxidation process; step 4, fixed temperature diffusion process; step 5, variable temperature diffusion process; step 6, knot pushing diffusion process; step 7, variable temperature annealing process; step 8, ultralow temperature boat exiting process. Compared with traditional constant temperature diffusion technology, the high-efficiency low-cost solar cell diffusion technology provided by the invention shortens diffusion technology time, reduces technology gas cost, improves uniformity and repeatability of diffusion sheet resistor.

Description

technical field [0001] The invention relates to a solar cell diffusion process, in particular to a crystalline silicon solar cell diffusion process design for improving solar cell efficiency and reducing production costs. Background technique [0002] The increase in fossil energy consumption has led to an increase in air pollutant emissions year by year. Therefore, solar energy, as a green and renewable energy source, is more and more respected by people. The urgency of power generation applications. However, how to make solar cells with higher conversion efficiency and lower cost is a key issue for the rapid promotion of the photovoltaic application market. [0003] Diffusion is a key process in the production process of solar cells. The purpose of diffusion is to make the PN junction of solar cells. However, crystalline silicon solar cells generally adopt the method of liquid source for diffusion, that is, oxygen, nitrogen and phosphorus oxychloride vapor are introduced...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18H01L21/228
CPCH01L21/223H01L31/1804Y02E10/547Y02P70/50
Inventor 石劲超
Owner 百力达太阳能股份有限公司
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