Control device for crystal growth furnace cooling water flow adjustment

Abstract

A control device for crystal growth furnace cooling water flow adjustment is characterized by comprising a water storage body, flow monitoring devices and flow adjustment devices; a water storage cavity is arranged in the water storage body, the water storage body is provided with a total water inlet for communicating with the water storage cavity, and multiple water outlets all communicating with the water storage cavity, wherein each water outlet is provided with a flow monitoring device and a flow adjustment device; and by observing of the surface velocity of an alumina melt in a crystal growth furnace, the flow monitoring device and the flow adjustment device are controlled to achieve precise adjustment of the cooling water flow of each water outlet.

Description

technical field [0001] The invention relates to a water volume regulation control device, in particular to a control device for crystal growth furnace cooling water volume regulation. Background technique [0002] Light Emitting Diode (LED) has outstanding advantages such as long life, low energy consumption, small size, fast response, shock resistance and low temperature resistance, and low pollution. Its application fields are extremely broad and its market potential is huge. Another revolution in history." LED substrate materials are also important to their performance and cost, because sapphire crystal has a unique lattice structure, excellent mechanical properties, thermal properties, optical properties, mechanical properties and chemical stability, it has become a practical The most ideal substrate materials, such as GaN semiconductor light-emitting diodes, account for more than 90% of the substrate market. In addition, sapphire crystals are widely used in many fields...

AI Technical Summary

Problems solved by technology

[0004] At present, the water separator configured by traditional equipment adopts a simple structure in which the thick tube enters the thin tube and exits, and this structure cannot accurately adjust the water flow of each water outlet.

In turn, the heat energy taken away by each symmetrical furnace cavity due to the inconsistency of the water flow rate is different, resulting in changes in the temperature gradient of the longitudinal and transverse temperature fields of crystal growth symmetry, which cannot ensure the symmetry of the temperature gradient of the crystal growth temperature field, and thus cannot accurately control the crystal. During the growth process, it is difficult to ensure the stability of crystal growth quality

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