Flexible embedded type optical interconnection structure and manufacturing method of flexible embedded type optical interconnection structure
An embedded and optical interconnection technology, applied in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., can solve the problems of immature mass production of organic optical waveguide materials, and achieve the effect of simple manufacturing process
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Embodiment 1
[0033] A flexible embedded optical interconnection structure, comprising an optical waveguide plate 1 composed of a cladding material 3 and an optical waveguide 2 embedded in the cladding material 3, the optical waveguide plate 1 is provided with a light reflection The laser ablation groove 4 of the interface 5, the side of the laser ablation groove 4 on the optical waveguide plate 1 is vertically provided with a through hole 6 penetrating the optical waveguide plate 1; the upper and lower surfaces of the optical waveguide plate 1 are sequentially provided with Patterned electroless copper plating layer 7, metal electroplating layer 8 and metal protective layer 9, photoelectric chip 10 and electric chip 11 are installed above the metal protective layer 9 on the upper surface of the optical waveguide plate 1, and the photoelectric chip 10 and electric chip 11 are covered There is a sealing colloid 13 ; an external electrical interface is provided under the metal protection layer...
Embodiment 2
[0065] In this embodiment, the external electrical interface is a golden finger, and the structure of one end of this embodiment is as follows Figure 5 shown. Gold fingers 18 are located on the top of the flexible embedded optical interconnection structure, and can be distributed on one side (upper surface or lower surface) of the optical waveguide plate 1 , or can be distributed on the upper and lower surfaces of the optical waveguide plate 1 at the same time. The optical interconnection structure is electrically pluggable, flexible to use, and convenient to replace.
[0066] The structure of this embodiment applied to the printed circuit board is as follows: Image 6 shown. The golden finger is arranged on the printed circuit board through the connector 19, which is a board edge connector suitable for flexible materials and has sufficient high-frequency bandwidth. The connector 19 is welded on the printed circuit board 16 through the pad 17 , and the gold finger 18 of th...
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