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Alticrn/mon nano-multilayer coating firmly bonded to tool surface and preparation method thereof

A combination of strong, nano-multi-layer technology, applied in coating, metal material coating process, ion implantation plating, etc., can solve the problem of low bonding force between TiMoN coating and substrate, which cannot be used in practical applications, and TiMoN coating anti-friction The effect is not obvious and other problems, to achieve the effect of good high temperature oxidation resistance, good economic benefits, low friction coefficient

Inactive Publication Date: 2016-06-08
SICHUAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the atomic percentage of Mo is lower than 60%, the anti-friction effect of TiMoN coating is not obvious
More importantly, the report pointed out that the bonding force of the TiMoN coating to the substrate is very low, less than 10N, so it cannot be used in practical applications.

Method used

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  • Alticrn/mon nano-multilayer coating firmly bonded to tool surface and preparation method thereof
  • Alticrn/mon nano-multilayer coating firmly bonded to tool surface and preparation method thereof
  • Alticrn/mon nano-multilayer coating firmly bonded to tool surface and preparation method thereof

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preparation example Construction

[0047] The present invention also provides a method for preparing an AlTiCrN / MoN nano-multilayer coating firmly bonded to the tool surface, comprising the following steps:

[0048] a. Pretreatment and heating of the tool substrate 1;

[0049] b. Plasma cleaning;

[0050] c. Depositing the Ti bonding layer 2 by vapor deposition;

[0051] d. Depositing the TiN gradient structure layer 3 by evaporation method;

[0052] e, deposit AlTiCrN support layer 4 by magnetron sputtering method;

[0053] f. Depositing the AlTiCrN / MoN functional layer 5 by magnetron sputtering.

[0054] The steps a to f of the above method can be completed in a conventional multifunctional coating machine, or can be carried out by using evaporation coating and magnetron sputtering coating equipment respectively. The PEMS-800 multifunctional superhard film tool developed by Sichuan University is preferably used in the present invention. Mold coating machine, this coating machine has large evaporation coat...

Embodiment 1

[0064] Ultrasonic cleaning of cemented carbide turning tools in cleaning solution and acetone solution for 10 minutes to remove oil stains, dehydration treatment with alcohol solution for 5 minutes, after drying, put them into PEMS-800 multifunctional superhard film tool and mold coating machine, and vacuum to 6.0×10 -1 Pa, and then argon gas is introduced into the coating chamber, and the pressure is controlled at 3.5×10 －1 Pa, turn on the rotation, control the revolution speed of the tool substrate in the furnace to 3rpm, turn on the hot cathode ion column arc to make the current 160A, use the electrons generated by it to bombard the tool substrate for heating, and the time is 80min. Adjust the flow rate of argon, and control the pressure in the chamber to be 1.9×10 -1 Pa, apply a DC bias of -150V and a pulse bias of -350V to the substrate, and use argon ions ionized in the plasma area to etch and clean the tool substrate for 15 minutes. Adjust the flow of argon and contro...

Embodiment 2

[0067] Ultrasonic cleaning of high-speed steel taps in cleaning solution and acetone solution for 10 minutes to remove oil stains, dehydration treatment with alcohol solution for 5 minutes, after drying, put them into PEMS-800 multifunctional superhard film tooling and mold coating machine, and vacuum to 6.0× 10 -1 Pa, and then argon gas is introduced into the coating chamber, and the pressure is controlled at 3.3×10 －1 Pa, turn it on, control the revolution speed of the tool base in the furnace to 3rpm, turn on the hot cathode ion column arc to make the current 150A, use the electrons generated by it to bombard the tool base for heating, and the time is 50min. Adjust the flow rate of argon, and control the pressure in the chamber to be 1.8×10 -1 Pa, applying a DC bias of -200V and a pulse bias of -500V to the substrate, using argon ions ionized in the plasma area to etch and clean the tool substrate, and the cleaning time is 40min. Adjust the flow of argon and control the w...

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Abstract

The invention discloses an AlTiCrN / MoN nano laminated coating firmly combined with the surface of a tool, and a preparation method of the nano laminated coating, belonging to the field of a surface engineering technology. The laminated coating is provided with four layers on the surface of the tool from inside to outside, and the four layers are sequentially a Ti combining layer (2), a TiN gradient structure layer (3), an AlTiCrN support layer (4) and an AlTiCrN / MoN functional layer (5); the laminated coating is prepared by the steps: carrying out pretreatment on a base body (1) of the tool, and heating the base body (1); carrying out plasma cleaning; carrying out evaporation on the Ti combining layer (2); carrying out evaporation on the TiN gradient structure layer (3); and carrying out sputtering deposition on the AlTiCrN support layer (4) and the AlTiCrN / MoN functional layer (5). The AlTiCrN / MoN nano laminated coating can be well combined with the surface of the tool, and is good in wear resistance; the method is good in controllability and easy to implement, thus having good industrial application prospect.

Description

technical field [0001] The invention belongs to the technical field of surface engineering, and in particular relates to an AlTiCrN / MoN nanometer multi-layer coating firmly combined with a tool surface and a preparation method thereof. Background technique [0002] With the continuous improvement of processing requirements, tool processing technology and tool surface coating technology have correspondingly developed greatly. The successful application of the coating on the tool increases the original service life of the tool by 2 to 5 times, significantly improves the processing efficiency and saves the cost. TiN is the most widely used coating for tool surfaces, with a hardness of about 24GPa, a friction coefficient of 0.55, and a maximum service temperature of 600°C. It is an ideal tool coating for low-speed cutting. The CrN coating has a hardness of about 19GPa, a friction coefficient of 0.3, and a maximum service temperature of 700°C. It is an ideal anti-friction coatin...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06
Inventor 赵海波鲜广梁红樱梁雅庭杜昊王辉
Owner SICHUAN UNIV