Preparation method of titanium-containing medium and high temperature solar energy absorption coating

Abstract

The present invention provides a preparation method for a titanium-containing medium-high temperature solar energy absorption coating. The preparation method comprises: S1, selecting a substrate, and preparing an aluminum film on the substrate as a metal infrared reflection layer; S2, adopting pure titanium as a target, adopting argon gas and nitrogen gas mixed gas as sputtering gas, and adopting magnetron sputtering to prepare a first absorption layer on the metal infrared reflection layer; S3, maintaining the constant state of the target and the sputtering gas in the step S2, reducing the sputtering current while reducing the nitrogen flow, and preparing a second absorption layer on the first absorption layer; and S4, preparing an optical antireflection layer. With the method, the production process of the medium-high temperature solar energy absorption coating is substantially simplified, and the titanium raw material is cheap so as to reduce the cost, and the production time is saved; and the reaction gas only uses the nitrogen gas without oxygen so as to further simplify the process, save the gas switching time, and reduce the risks of target poisoning and anode disappearing caused by the oxidation reaction.

Description

technical field [0001] The invention relates to the field of solar energy utilization, in particular to a preparation method of a titanium-containing medium-high temperature solar absorbing coating. Background technique [0002] In recent years, with the increasingly prominent energy issues, the solar thermal utilization industry has received unprecedented attention and development. In solar thermal utilization technology, solar absorbing coating, as a key technology, has been the focus of research at home and abroad. Since an important way to improve the light-to-heat conversion efficiency is to increase the working temperature of the coating, current research is mainly focused on how to improve the thermal stability of the coating. At present, the preparation of this kind of coating at home and abroad mainly relies on multi-target magnetron sputtering coating technology. This is because the film coated by magnetron sputtering technology has the advantages of controllable ...

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Problems solved by technology

Both the above-mentioned first and third patents need to use oxygen, which increases the time for gas switching back and forth, and has the risk of target poisoning and anode disappearance caused by oxidation reaction

[0003] Metal titanium is cheap, and it is used to process targets to help reduce production costs, and titanium is resistant to high temperatures, and titanium-containing coatings often have good thermal stability, but currently commonly used titanium-containing coatings require both nitrogen and oxygen. The preparation process is too complicated and the production stability is not high

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