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Method and device for the preparation of a sample for microstructure diagnostics

A microstructure and sample technology, applied in the preparation of test samples, discharge tubes, electrical components, etc., can solve problems such as inability to penetrate into bulk materials, damage, etc.

Active Publication Date: 2014-07-02
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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  • Description
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  • Application Information

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Problems solved by technology

However, a disadvantage is that this method also requires about half a day to a day to prepare the sample, and at the same time, in the region to be prepared (below the platinum protective layer), the specific implantation in the sample flake is affected by the ion beam (which results in practical damage or doping of the detected material), the flakes have a maximum dimension in the range of about 20 μm × 5 μm, and samples can only be prepared close to the surface, not deep into the bulk material

Method used

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  • Method and device for the preparation of a sample for microstructure diagnostics
  • Method and device for the preparation of a sample for microstructure diagnostics
  • Method and device for the preparation of a sample for microstructure diagnostics

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Embodiment Construction

[0048] figure 1 Shown is a disc 1 which is thinned to a thickness d of 100 μm in an extensive plane-parallel manner as a starting basis for the method according to the invention 1 . Produced using mechanical grinding, laser etching or plasma spark erosion or other processing techniques known from the prior art, the disc is fabricated so that it can be accommodated in a standard TEM holder due to its diameter of 3 mm middle. Dimensioning of the disk 1 to a diameter of 3 mm can also be easily achieved with a laser micromachining system which is also used for the introduction of the depressions according to the invention (see for example DE 10 2008 000 306 A1 or Figure 4 ). Here, the surface of the disc oriented towards the viewer is denoted by 2a and the back side of the disc oriented away from the viewer is denoted by reference numeral 2b. In both surfaces, as described in more detail below, recesses are constructed internally. For better illustration, the disc 1 is only ...

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Abstract

The present invention relates to a method for the preparation of a sample for microstructure diagnostics, in particular for transmission electron microscopy TEM, scanning electron microscopy or X-ray absorption spectroscopy, wherein a flat, preferably plane-parallel plate is irradiated along each of the two opposite surfaces thereof with a high-energy beam such that, as a result of radiation-induced material removal, there is formed in each of said two surfaces a depression which runs preferably parallel to a central plate plane, wherein said two depressions are formed, so as to run at both sides of said / a central plate plane, such that the longitudinal axes thereof, as viewed in a projection of said longitudinal axes onto said central plate plane, intersect at a predefined angle a > 0 DEG , preferably a = 10 DEG , preferably a = 20 DEG , preferably a = 30 DEG , and that, in the region of intersection of the two depressions, a material portion which is preferably transparent to electron beams and which is of predefined minimum thickness as viewed perpendicular to said central plate plane remains between said depressions as a sample. The invention also relates to a correspondingly designed device.

Description

technical field [0001] The present invention relates to a method and an apparatus for the preparation of samples for microstructural diagnostic assays (microdiagnostics), in particular, for example, flake-shaped samples for transmission electron microscopy (hereinafter also abbreviated as TEM) Or samples for scanning electron microscopy or X-ray absorption spectroscopy. Therefore, the method according to the invention or the device according to the invention is especially suitable for use in microstructural diagnostics, wherein by thinning the preparation (for the final sample) the amount of excitation or signal inherent in the method can be reduced and thus can be Increase local resolution. The invention will subsequently be described in detail with reference to the production of samples for transmission electron microscopy. However, the method and apparatus can similarly be used to prepare samples for other microstructural diagnostics. Background technique [0002] The ...

Claims

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Application Information

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IPC IPC(8): G01N1/32H01J37/305
CPCG01N1/32H01J2237/31749H01J37/3056H01J2237/31745H01J2237/2802
Inventor 托马斯·奥什
Owner FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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