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Method for Conformally Covering Graphene Directly on the Surface of Needle Tips

A technology of conformal coverage and graphene, applied in the field of materials, can solve the problems of affecting application and high preparation temperature, and achieve the effects of short preparation cycle, low preparation temperature and good application prospects

Active Publication Date: 2016-04-06
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method introduces Au film into the graphene / silicon tip, which affects its application in some aspects, and the preparation temperature is too high

Method used

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  • Method for Conformally Covering Graphene Directly on the Surface of Needle Tips
  • Method for Conformally Covering Graphene Directly on the Surface of Needle Tips
  • Method for Conformally Covering Graphene Directly on the Surface of Needle Tips

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Experimental program
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Effect test

Embodiment 1

[0029] A method for conformally covering graphene directly on the surface of a needle tip, comprising the following steps:

[0030] (1) Put a silicon needle tip with a radius of curvature of 100 nm into pure water for ultrasonic cleaning for 3 minutes, and dry it with nitrogen;

[0031] (2) the vacuum chamber center (such as figure 1 shown), close the vacuum chamber, after evacuating to the background vacuum degree, clean each gas path connected to the vacuum chamber with nitrogen, then evacuate the vacuum chamber to the background vacuum degree, and fill the vacuum chamber with Hydrogen, the pressure is maintained at 1KPa;

[0032] (3) After the filling of hydrogen in step (2) is completed, the vacuum chamber is heated to 550°C through a tube-type high-temperature furnace, and 3 sccm of methane gas and 10 sccm of hydrogen gas are introduced into the vacuum chamber, the air pressure is maintained at 50 Pa, and the power of the radio frequency power supply is set to Set as 30...

Embodiment 2

[0037] A method for conformally covering graphene directly on the surface of a needle tip, comprising the following steps:

[0038] (1) Put a tungsten needle tip with a radius of curvature of 10 μm into pure water for ultrasonic cleaning for 3 minutes, and dry it with nitrogen;

[0039] (2) Place the tungsten needle tip cleaned and dried in step (1) on the sample stage in the center of the vacuum chamber of the flat PECVD system (such as Figure 4 shown), close the vacuum chamber, after evacuating to the background vacuum degree, clean each gas path connected to the vacuum chamber with nitrogen, then evacuate the vacuum chamber to the background vacuum degree, and fill the vacuum chamber with Hydrogen, the pressure is maintained at 500Pa;

[0040] (3) After step (2) is filled with hydrogen, the temperature of the sample stage in the center of the vacuum chamber is raised to 530°C, 5 sccm of methane gas and 20 sccm of hydrogen gas are introduced into the vacuum chamber, the ai...

Embodiment 3

[0043] A method for conformally covering graphene directly on the surface of a needle tip, comprising the following steps:

[0044] (1) Soak the platinum needle tip with a tip curvature radius of 1 μm in acetone, 95vol% ethanol, and pure water for 3 minutes, and dry it with nitrogen;

[0045] (2) Place the platinum needle tip cleaned and dried in step (1) on the sample stage in the center of the vacuum chamber of the flat PECVD system (such as Figure 4 shown), close the vacuum chamber, and after evacuating to the background vacuum degree, use argon to clean each gas path connected to the vacuum chamber, then evacuate the vacuum chamber to the background vacuum degree, and then inject the vacuum chamber into the vacuum chamber Filled with argon, the pressure is maintained at 20Pa;

[0046] (3) After step (2) is filled with hydrogen, the temperature of the sample stage in the center of the vacuum chamber is raised to 400°C, and 4 sccm of ethanol gas, 5 sccm of hydrogen gas and...

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Abstract

The invention discloses a method for directly and conformally covering graphene on the surface of a needle point. The method comprises the steps of placing a cleaned and dried needle point into a PECVD (Plasma Enhanced Chemical Vapor Deposition) vacuum chamber, emptying air in the chamber, and filling protective gas into the chamber; then, heating the needle point to the graphene growing temperature, introducing carbon source gas and protective gas playing a current-carrying role to the chamber, maintaining the air pressure at the graphene growing pressure and setting the radio frequency power to graphene growing power to ensure that graphene directly grows on the surface of the needle point; after the growth of the graphene is ended, turning off a radio frequency power supply, stopping introducing the carbon source gas to the chamber, cooling the needle point to room temperature under the protection of the protective gas at the graphene growing pressure, taking out the needle point, and covering a continuous and uniform graphene film on the tip end and side surface of the needle point. The method disclosed by the invention is simple in operation, free of metal catalyst and complex graphene transfer process, low in preparation temperature, short in period, low in cost, suitable for preparing needle points made of various materials such as silicon, tungsten and capable of realizing batch preparation of graphene-covered needle points.

Description

technical field [0001] The invention belongs to the technical field of materials and relates to a method for covering graphene on the surface of materials. Background technique [0002] Graphene is a planar film composed of carbon atoms in a hexagonal lattice with sp2 hybrid orbitals. It is a new two-dimensional material with only one atomic thickness. It has excellent properties in mechanics, heat, optics, electricity, etc. Properties, such as ultra-high mechanical strength, good thermal conductivity, wide-spectrum high transparency and super-conductivity, etc. [0003] Needle-tip technology has shown broad application prospects in many fields such as medical treatment, semiconductor, scanning probe microscopy, and biological environment detection. Graphene-covered tips have obvious advantages in many aspects: First, graphene is the best known conductor material, and graphene-covered tips can be used as conductive tips for electrical measurements, and can also be used in a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/26
Inventor 魏大鹏杨俊朱鹏余崇圣张永娜姜浩黄德萍李占成史浩飞杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI