A device for comprehensive utilization of mocvd equipment tail gas

Abstract

The invention provides a device for comprehensively utilizing tail gas of MOCVD (Metal-Organic Chemical Vapor Deposition) equipment. The tail gas of MOCVD enters a low-pressure buffer tank by virtue of a pipeline, and the low-pressure buffer tank is connected with a high-pressure buffer tank; the high-pressure buffer tank is connected to a precooling exchanger by virtue of a pipeline, and the lower end of the precooling exchanger is connected with a lower-temperature condenser by virtue of a pipeline; the lower part of the lower-temperature condenser is connected with a gas-liquid separator by virtue of a pipeline, the lower end of the gas-liquid separator is connected with a liquid ammonia storage tank by virtue of a liquid ammonia pump, and the top end of the gas-liquid separator is connected to a molecular sieve absorption column; the upper end of the molecular sieve absorption column is connected to a pressure-swing absorption column, and the pressure-swing absorption column is connected with a hydrogen storage tank by virtue of a pipeline. The device has a simple structure and can be used for effectively separating the tail gas of the MOCVD, liquid ammonia and hydrogen are recycled and can be directly applied to other industries, and nitrogen can be directly discharged. The rate of multipurpose utilization is high, and the purposes of safety and environmental friendliness are realized.

Description

technical field [0001] The invention relates to a gas separation device, in particular to a device for tail gas separation and comprehensive application of MOCVD equipment. Background technique [0002] MOCVD equipment has a wide range of applications in LED lighting, blue-green lasers, solar cells, etc. MOCVD equipment at this stage requires the application of a large amount of gases, including hydrogen, nitrogen, and high-purity ammonia. Due to the extremely low comprehensive utilization rate of gas by the equipment, generally 99% of the gas is discharged through the tail gas, the comprehensive utilization rate is low, and hydrogen is flammable and explosive, and ammonia is corrosive and toxic, which has a great impact on the environment and poses a safety hazard High, exhaust gas treatment is difficult. [0003] Disadvantages of existing methods of use: the current conventional method is to use dilute acid or pure water to absorb ammonia in the tail gas to form ammonia ...

AI Technical Summary

Problems solved by technology

Due to the extremely low comprehensive utilization rate of gas by the equipment, generally 99% of the gas is discharged through the tail gas, the comprehensive utilization rate is low, and hydrogen is flammable and explosive, and ammonia is corrosive and toxic, which has a great impact on the environment and poses a safety hazard High, exhaust gas treatment is difficult

[0003] Disadvantages of existing methods of use: the current conventional method is to use dilute acid or pure water to absorb ammonia in the tail gas to form ammonia water or ammonium salt

This method forms a large amount of wastewater containing ammonia nitrogen, which has a great impact on the environment

And the hydrogen is directly discharged through the chimney, which has potential safety hazards

Images