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Manufacturing method of solar energy battery

A solar cell and manufacturing method technology, applied to circuits, photovoltaic power generation, electrical components, etc., can solve the problems of expensive equipment, high operating costs, and high process complexity, so as to reduce manufacturing costs, solve alignment problems, and simplify process steps. Effect

Active Publication Date: 2014-08-13
KINGSTONE SEMICONDUCTOR LIMITED COMPANY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The technical problem to be solved by the present invention is to overcome the defects in the prior art that multiple alignments are required, the process complexity is high, the process steps are complicated, relatively expensive equipment is required, and the operation cost is high during the production process of the solar cell, providing A method of manufacturing a solar cell capable of realizing "self-alignment", which does not cause alignment problems in the process of forming the doped region or in the process of manufacturing the electrode, and simplifies the process steps, and there is no need to introduce expensive equipment, which greatly reduces the production cost

Method used

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  • Manufacturing method of solar energy battery
  • Manufacturing method of solar energy battery

Examples

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Embodiment 1

[0044] refer to Figure 1-5 , the manufacture method of the solar cell described in the present embodiment is as follows:

[0045] Such as figure 1 As shown, a substrate is provided, which is a commercially available silicon wafer used for making solar cells. After texturizing the front side of the silicon wafer 1 , a P-type heavily doped layer 2 is formed on the entire back side of the silicon wafer 1 . When the IBC battery is in use, the front side receives light, and the back side is provided with electrodes. However, due to the practice in the field, the upper side is the back side and the lower side is the front side. This is well known to those skilled in the art.

[0046] Such as figure 2As shown, a mask 3 is formed on the entire back surface of the silicon wafer 1, and the area not covered by the mask 3 is an open area. Specifically, the specific formation method of the mask 3 may be to first apply a mask layer on the back surface, then form a pattern protective la...

Embodiment 2

[0054] The principle of embodiment 2 is the same as that of embodiment 1, the difference is:

[0055] A physical method such as laser ablation is used to etch the part not covered by the mask to form the groove, and then a chemical method (such as wet chemical etching) is used to remove the damaged layer left by the physical method.

[0056] All the other unmentioned steps are the same as in Example 1.

Embodiment 3

[0058] The principle of embodiment 3 is the same as that of embodiment 1, the difference is:

[0059] In the manufacturing process of the solar battery, a step of forming an anti-reflection layer on the front surface of the silicon chip is also included.

[0060] All the other unmentioned steps are the same as in Example 1.

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Abstract

The invention discloses a manufacturing method of a solar energy battery. The method comprises: forming a first conductive type doping layer on the back surface of a substrate; forming a groove and a first conductive type doping area in the back surface of the substrate; forming a second conductive type doping area through an ion implantation mode; performing annealing processing on the substrate so as to form a first passivation layer on the side wall of the first conductive type doping area, the second conductive type doping area and the groove; forming a first metal layer on the first passivation layer; performing chemical etching on the first metal layer to remove the first metal layer on the side wall of the groove so as to form a first electrode in the first conductive type doping area and form a second electrode in the second conductive type doping area. By using the manufacturing method of the self-aligning solar energy battery, the problem of aligning during the manufacturing process of the solar energy battery is completely solved, and the process steps are greatly simplified.

Description

technical field [0001] The invention relates to a manufacturing method of a solar cell. Background technique [0002] The PN junction (PN junction) adopts different doping processes, and through diffusion, the P-type semiconductor and the N-type semiconductor are fabricated on the same semiconductor (usually silicon or germanium) substrate, and space charges are formed at their interface. The region is called a PN junction, and the PN junction has unidirectional conductivity. The PN junction is an important part of solar cells. [0003] The IBC (interdigitated back contact) solar cell is the earliest researched back contact cell. Since the electrodes of the IBC cell are all set on the back, and the front does not contain any electrodes, it can increase the receiving area of ​​sunlight, thereby improving the conversion of solar cells. efficiency. [0004] However, just because the electrodes of the IBC battery are all arranged on the back side, the back side includes dopin...

Claims

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Application Information

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IPC IPC(8): H01L31/18
CPCH01L31/022441H01L31/1804Y02E10/547Y02P70/50
Inventor 王懿喆金光耀洪俊华
Owner KINGSTONE SEMICONDUCTOR LIMITED COMPANY
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