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Method for preparing large size carbon/silicon carbide composite material heating element

A carbon composite material and composite material technology are applied in the field of preparation of large-sized carbon/silicon carbide composite heating elements, which can solve problems such as affecting the service life of the heating element, mismatching thermal expansion coefficients, and easy cracking of coatings, avoiding mechanical Damage, Guaranteed Strength, Guaranteed Uniformity

Active Publication Date: 2014-08-27
XIAN CHAOMA SCI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the thickness of the silicon carbide coating is only tens of microns to hundreds of microns, and the thermal expansion coefficient between the silicon carbide coating and the carbon substrate does not match, there are problems such as easy cracking of the coating during use, which affects the use of the heating element. life

Method used

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  • Method for preparing large size carbon/silicon carbide composite material heating element
  • Method for preparing large size carbon/silicon carbide composite material heating element

Examples

Experimental program
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Effect test

Embodiment 1

[0032] Step 1. According to the shape and performance requirements of the heating element to be prepared, use carbon fiber, carbon cloth and net tire to make a density of 0.20g / cm by conventional methods 3 carbon fiber preform, and then the carbon fiber preform is densified to a density of 1.50g / cm 3 The carbon / carbon composite material; the method of densification is: carbon fiber prefabricated body is placed in chemical vapor deposition furnace, adopts propylene (also can adopt natural gas or the mixed gas of propylene and natural gas) to carry out chemical vapor phase as carbon source gas Infiltration, the process parameters of chemical vapor infiltration are: the flow rate of carbon source gas is 50L / min, the temperature of chemical vapor infiltration is 900°C, and the holding time is 30h; then the carbon fiber preform after chemical vapor infiltration is placed in an impregnation furnace , carry out furfurone resin pressure impregnation under the condition of pressure of ...

Embodiment 2

[0039] Step 1. According to the shape and performance requirements of the heating element to be prepared, use conventional methods to make a density of 0.50g / cm by using carbon fiber, carbon cloth and mesh tires 3 carbon fiber preform, and then the carbon fiber preform is densified to a density of 1.60g / cm 3 carbon / carbon composite material; the method of densification is: carbon fiber prefabricated body is placed in chemical vapor deposition furnace, adopting the mixed gas of propylene and natural gas (also can adopt propylene or natural gas) that the volume ratio is 1:1 Chemical vapor infiltration is carried out as carbon source gas. The process parameters of chemical vapor infiltration are: the flow rate of carbon source gas is 200L / min, the temperature of chemical vapor infiltration is 1100°C, and the holding time is 60h; then the carbon fiber after chemical vapor infiltration The prefabricated body is placed in an impregnation furnace, and the phenolic resin pressure impr...

Embodiment 3

[0046] Step 1. According to the shape and performance requirements of the heating element to be prepared, use carbon fiber, carbon cloth and net tire to make a density of 0.40g / cm by conventional methods 3 carbon fiber preform, and then the carbon fiber preform is densified to a density of 1.55g / cm 3 The carbon / carbon composite material; the method of densification is: carbon fiber prefabricated body is placed in chemical vapor deposition furnace, adopts natural gas (also can adopt the mixed gas of propylene or propylene and natural gas) to carry out chemical vapor phase as carbon source gas Infiltration, the process parameters of chemical vapor infiltration are: the flow rate of carbon source gas is 100L / min, the temperature of chemical vapor infiltration is 1000°C, and the holding time is 45h; then the carbon fiber preform after chemical vapor infiltration is placed in an impregnation furnace , carry out pressure impregnation of phenolic resin and furfurone resin (mass ratio...

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Abstract

The invention discloses a method for preparing a large size carbon / silicon carbide composite material heating element. The method comprises the steps of 1, densifying a carbon fiber precast body to obtain a carbon / carbon composite material; 2, mechanically processing to obtain a carbon / carbon composite material heating element; 3, combining a first tooling, a second tooling and the carbon / carbon composite material heating element, and horizontally putting on a base plate; 4, filling silicon slurry so as to obtain a composite member; and 5, putting the composite member into a heating furnace for reaction infiltration, after being discharged from the furnace, removing the first tooling and the second tooling, so as to obtain the carbon / silicon carbide composite material heating element, or overlaying multiple composite members and putting into the heating furnace for reaction and infiltration, after being discharged from the furnace, removing the first tooling and the second tooling, so as to obtain the carbon / silicon carbide composite material heating element. Compared with the carbon / carbon composite material heating element, the carbon / silicon carbide composite material heating element prepared by the method has the service life more than 18 months, prolonging the service life by over 50%.

Description

technical field [0001] The invention belongs to the technical field of preparing thermal field components for polycrystalline silicon hydrogenation furnaces, and in particular relates to a method for preparing a large-scale carbon / silicon carbide composite material heating element. Background technique [0002] At present, carbon / carbon composite materials are generally used as heating elements for polycrystalline silicon hydrogenation furnaces. During the thermal hydrogenation of polysilicon, silicon-containing gases (including silicon tetrachloride and trichlorosilane) can chemically react with carbon materials (matrix carbon and carbon fibers), causing the carbon materials to be eroded, making the heating element carbon fibers and matrix The char flakes off, gradually thins, and eventually causes the product to fail. Therefore, how to effectively suppress the erosion of carbon materials is a key technical issue to improve the service life of the heating element used in t...

Claims

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Application Information

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IPC IPC(8): C04B35/80C04B35/65
Inventor 张永辉肖志超李永军刘亚琴苏君明侯卫权彭志刚孟凡才
Owner XIAN CHAOMA SCI TECH
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