Device and method for preparing combined film material warehouse

Abstract

The invention belongs to the technical field of film material preparation and particularly relates to a device and method for preparing a combined film material warehouse. The device disclosed by the invention is composed of a combined pulse laser coating machine, a laser, a computer, a compound molecular pump and a double-stage rotary vane pump, wherein the combined pulse laser coating machine is composed of an RHEED (Reflection High-Energy Electron Diffraction) electronic gun, a pre-pumping pipeline, a stepping motor, a target selection swing mechanism, an RHEED fluorescent screen, a CCD (Charge Coupled Device) image sensor, a laser window, a substrate frame, a mask frame, a servo motor and a vacuum chamber, wherein the target selection swing mechanism is used for controlling target switching. A method provided by the invention comprises the steps of designing a mask with a corresponding structure according to a deposition film, and precisely and controllably depositing a multi-element component film warehouse through the combined pulse laser coating machine. The device disclosed by the invention is simple and convenient to operate, modularized in structure, convenient to maintain, capable of filling up the blank of the device for depositing the film material warehouse at high controllability at present and providing a novel feasible method for preparing the film material warehouse and wide in application prospect.

Description

technical field [0001] This invention belongs to the technical field of thin film material preparation, and specifically relates to a device and method for preparing a combined thin film material library. Background technique [0002] Combinatorial Materials Science (Combinatorial Materials Science), which emerged in the mid-1990s, is a new interdisciplinary subject formed by the combination of combinatorial methods and material science. Different from the strategy of synthesizing and characterizing one material at a time in traditional materials research, the combinatorial method adopts a research strategy of parallel synthesis and high-throughput characterization, and quickly synthesizes a large number of different materials through limited steps in a short period of time, forming the so-called material libraries (also known as material chips) and quickly characterize their properties, enabling efficient screening / optimization of new materials. This method greatly speeds ...

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Problems solved by technology

At the same time, there is currently no combined pulse laser deposition system and equipment with high control accuracy in China, especially for the mask control and design of combined pulse laser deposition. Mask design patent (China, CN101487113A, July 22, 2009), has the problems of low operability, low control precision, and less dynamic parameterized design, and even if the existing equipment has surface detection equipment, it is often used Focus on surface analysis, not control of surface deposition state

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