A zno/α-si nanometer radial heterojunction solar cell and its preparation method
A solar cell and heterojunction technology, which is applied in the field of solar cells, can solve problems that limit the wide application of solar cells, and achieve the effects of improving light absorption capacity, conversion efficiency, and transport capacity
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[0025] refer to figure 1 , figure 1 A flowchart showing a method for preparing a ZnO / α-Si nanometer radial heterojunction solar cell according to an embodiment of the present invention.
[0026] (1) In step 101, firstly, the quartz substrate 201 is cleaned by ultrasonic cleaning with concentrated acetone for 15 minutes, then ultrasonic cleaning with alcohol and deionized water for 10-20 times respectively, and drying with nitrogen gas.
[0027] (2) Next in step 102, an AZO film 202 is grown on the surface of the quartz substrate 201, such as figure 2 shown. Preferably, the composition of the AZO thin film is that the Al doping concentration is 2%-5%. The method for growing the AZO thin film on the surface of the quartz substrate includes but not limited to the PLD method. The process conditions for preparing the AZO thin film by PLD are: the background vacuum is high at 10 -4 Pa, substrate temperature 280-370°C, pressure 0.5Pa-3Pa, PLD pulse laser energy 200-300mj / pulse, ...
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