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Preparation apparatus of microspheric polymer coating

A polymer coating and preparation device technology, applied in coating, metal material coating process, gaseous chemical plating, etc., can solve the requirement that polymers are difficult to achieve fusion ignition, and it is difficult to meet the uniformity of microsphere polymer coating Requirements and other issues to achieve the effect of easy adjustment

Inactive Publication Date: 2014-11-05
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

The preparation of microsphere glow discharge polymer coating requires plasma-enhanced chemical vapor deposition method. On the other hand, physical experiments have special requirements on the performance of microsphere polymers, and the polymers prepared by the current plasma-enhanced chemical vapor deposition equipment are difficult to meet the requirements of fusion ignition

Method used

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  • Preparation apparatus of microspheric polymer coating
  • Preparation apparatus of microspheric polymer coating
  • Preparation apparatus of microspheric polymer coating

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Embodiment Construction

[0014] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0015] figure 1 It is a structural schematic diagram of the microsphere polymer coating preparation device of the present invention, in figure 1 Among them, the quartz resonant cavity 4 is located in the inductance coil 3, and the two lead wires of the inductance coil 3 are drawn out from the terminal on the top of the device, and connected to the radio frequency power supply 10, and the number of turns of the inductance coil 3 is adjustable to realize the adjustment of the plasma generation area. The inductance coil 3 is located in the radio frequency shield 2 to shield the high frequency signal of the inductance coil 3 . The intake pipe 1 is connected to the top of the quartz resonant cavity 4 , and the bottom of the quartz resonant cavity 4 is connected to the vacuum chamber 8 . The reaction gas is coupled to the plasma by the radio frequency indu...

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Abstract

The invention provides a preparation apparatus of a microspheric polymer coating. The apparatus comprises an air inlet pipe, a radio shielding case, an inductance coil, a quartz resonant cavity and a vacuum chamber. The quartz resonant cavity is positioned in the inductance coil which is positioned inside the radio shielding case. The air inlet pipe is connected with the quartz resonant cavity which is connected with the vacuum chamber. A sample rack, a sample lifting platform and a knocking stick are arranged inside the vacuum chamber. The preparation apparatus is applied in the preparation of a pellet ablation-layer material in the field of initial confinement fusion, and has the characteristic of realizing controllable thickness of the microspheric polymer coating, single layer of the microspheric polymer coating, multilayer doping and the like.

Description

technical field [0001] The invention relates to a preparation device for a microsphere polymer coating in the field of laser inertial confinement fusion. Background technique [0002] In the field of laser inertial confinement fusion, the glow discharge polymer coating has the advantages of high transmittance, optical measurement and infrared heating of deuterium-tritium ice layer; compact structure without micro-defects; high surface finish, etc., has become a fusion target pellet The fuel container is used as the material of the ablation layer of the target pellet in the fusion ignition project. The preparation of microsphere glow discharge polymer coating requires plasma-enhanced chemical vapor deposition method. On the other hand, physical experiments have special requirements on the performance of microsphere polymers, and the polymers prepared by current plasma-enhanced chemical vapor deposition devices are difficult to meet the requirements of fusion ignition. Cont...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/517C23C16/458
Inventor 何智兵何小珊许华李俊李玉红陈志梅
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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