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Recovery method of ferric chloride etching waste liquid

A technology of iron trichloride erosion and recovery method, which is applied in chemical instruments and methods, metallurgical wastewater treatment, water/sludge/sewage treatment, etc., to achieve good environmental and economic benefits, less operating costs, and low production costs Effect

Active Publication Date: 2016-08-31
宁波东顺电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Some methods currently used have some problems in varying degrees in terms of process cost, safety and comprehensive utilization of resources.

Method used

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  • Recovery method of ferric chloride etching waste liquid
  • Recovery method of ferric chloride etching waste liquid
  • Recovery method of ferric chloride etching waste liquid

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0122]1L of waste etching solution 1 was added to the anode chamber and cathode chamber liquid storage tank of the electrolytic cell composed of heterogeneous positive membranes, and the membrane polarization curve was measured at room temperature. It can be seen that the voltage increases linearly with the current. In order to better understand the influence of the electrolysis voltage on the electrolysis effect, the electrolysis test was carried out at the electrolysis cell voltage of 2.5, 3.0, 3.5, and 4.0V. Analyze the ferrous ions and iron ions in the sample. The total electrolysis time is 3.0h. After 3 hours of electrolysis, analyze the concentration of free acid and chloride ion. 2+ The amount of material change is used to calculate the current efficiency. The experimental results are shown in Table 1-1, Table 1-2, and Table 1-3.

[0123] Table 1-1, Fe in cathode and anode storage tanks during electrolysis 2+ Concentration change table

[0124]

[0125] Table 1-2,...

Embodiment 2

[0131] Add 1 L of waste etching solution 1 into the anode chamber and the cathode chamber. Different ion-exchange membranes were selected, electrolyzed at a constant voltage of 3.0V, and the total electrolysis time was 3.0h. In the experiment, 25 mL samples were taken in the anode storage tank and cathode storage tank every half hour, and the ferrous ions, iron ions, and free acid and chloride ion concentrations after electrolysis for 3 hours were analyzed, and the electrolysis current efficiency was calculated. As in Table 2-1 and 2-2. It can be seen from Table 2-1 and 2-2 that Fe ions migrate through the cathodic membrane to the cathode chamber in the electrolytic cell composed of heterogeneous cathodic membrane, and the electrolysis effect is better for heterogeneous cathodic membrane electrolyzer than homogeneous cathodic membrane electrolyzer. The heterogeneous negative film electrolyzer is the worst. From the perspective of free acid concentration (Table 2-3), using th...

Embodiment 3

[0139] There is no Na in the waste etching solution 2 + and H in acid + As a conductive ion, the negative membrane is selected to form an electrolytic cell for steady flow test. Add 3L of waste etching solution 2 to the anode storage tank, add 600ml of waste etching solution 2 to the cathode storage tank, and in a steady flow state, first perform electrolysis at a low current of 3.60A for 2 hours and then at a high current of 5.6A for 3 hours , the ferrous ions reacted to the anode are all oxidized to ferric ions. During this period, sample 25ml and 10ml in the anode chamber and the cathode chamber respectively every 1h or 2h (select specific questions), and analyze the ferrous ions and iron ions in the samples, as well as the free acid in the solution in each storage tank after electrolysis and chloride ion concentration and calculate the current efficiency. The results are shown in Table 3-1.

[0140] Table 3-1, 5.60A steady current electrolysis test results table

[01...

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Abstract

The invention provides a method for recovering ferric chloride etching waste etching solution, which adopts membrane electrolysis and extraction integration technology, and an ion exchange membrane is set in the electrolytic cell to divide the electrolytic cell to form an anode chamber and a cathode chamber, and the cathode and the anode are respectively The cathode chamber and anode chamber located on both sides of the ion exchange membrane; ferric chloride etching waste solution is added into the cathode chamber for membrane electrolysis, and the Fe 3+ ion reduction to Fe 2+ Ions; the solution after electrolysis in the cathode chamber is extracted to remove impurity metals to obtain the extract phase solution and the demetallized impurity phase solution, and the demetallized impurity phase solution is sent to the anode chamber for membrane electrolysis, and the Fe 2+ Ions are oxidized to Fe 3+ Ions; the solution obtained by electrolysis in the anode chamber is recovered. Compared with the current ferric chloride etching waste liquid treatment technology, the technological process is short and simple, no secondary pollution occurs, no three wastes are discharged, the production cost is low, and it is suitable for large-scale treatment. The annual treatment capacity can be more than 10,000 tons. It has good environmental and economic benefits.

Description

technical field [0001] The invention relates to a method for recovering ferric chloride etching waste liquid, in particular to a method for recovering ferric chloride etching waste liquid containing impurity metal ions. Background technique [0002] The etching method is suitable for large-volume, multi-variety, large-scale thin metal material processing and surface decoration of metal products (semi-etching). It is now used in various integrated circuit lead frames and fluorescent display displays, grids, precision filters, encoder gratings, microelectrodes, mask plates, integrated circuit cover plates, picture tube shadow masks, surface mount (SMT) solder paste For products such as screen printing plates, the etching method manufacturing process is often applied to high-tech fields. [0003] Ferric chloride solution has certain oxidation and acidity, and has a good corrosion effect on iron and nickel, so it is widely used in metal etching, such as etching of fine circuit ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23F1/46C02F1/461C02F1/26C02F1/62C02F101/20C02F103/16
Inventor 何公明梁泰频王满根
Owner 宁波东顺电子科技有限公司
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