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WO3-ZnO composite target and preparation method thereof

A technology of target material and composite ceramics, applied in the field of inorganic non-metallic elements and their compounds, can solve the problems of affecting optoelectronic properties, difficult to sinter and dense, low self-diffusion coefficient, etc.

Inactive Publication Date: 2014-12-03
SHENZHEN UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the self-diffusion coefficient of tungsten oxide / zinc oxide composite material is low, and the tungsten oxide in the target melts at about 1470 ° C, it is difficult to sinter dense
If sintering aids are added, the vapor-deposited tungsten oxide / zinc oxide composite film will affect its photoelectric properties due to impurities

Method used

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  • WO3-ZnO composite target and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0010] Take by weighing 200g purity 99.99% zinc oxide powder (average particle size 100 nanometers), 70g purity is 99.99% tungsten trioxide powder (average particle size 80 nanometers), and 13g purity is the polyethylene glycol 10000 of 99.9% as molding agent, Add the above-mentioned raw materials into deionized water and wet mill them in a ball mill for 24 hours, then dry the ball-milled raw materials at 60°C for 12 hours, pass through a 60-mesh sieve, and press them under a pressure of 100 MPa. After the sample was kept at 400°C for 4 hours to release the molding agent, it was continuously heated to 1250°C and sintered in the air under normal pressure for 120 minutes, and then cooled with the furnace to obtain highly dense WO. 3 -ZnO composite target, its related performance parameters are shown in figure 1 .

Embodiment 2

[0012] Take by weighing 100g purity be 99.99% zinc oxide powder (average particle size 10 microns), 23g purity be 99.99% tungsten trioxide powder (average particle size 17 microns), and 6g purity be the polyethylene glycol 10000 of 99.9% as molding agent , add the above raw materials into deionized water and wet mill them in a ball mill for 36 hours, then dry the ball milled raw materials at 80°C for 8 hours, pass through a 40-mesh sieve, press them under a pressure of 150Mpa, and press them After the molded sample is kept at 450°C for 3 hours to remove the molding agent, it is continuously heated to 1400°C and sintered in the air at normal pressure for 200 minutes, and then cooled with the furnace to obtain a highly dense WO 3 -ZnO composite target, its related performance parameters are shown in figure 1 .

Embodiment 3

[0014] Take by weighing 300g purity be the zinc oxide powder (average particle size 80 nanometers) of 99.99%, 180g purity be the tungsten trioxide powder (average particle size 5 microns) of 99.99%, and 20g purity be the polyethylene glycol 10000 of 99.9% as molding agent , add the above raw materials to deionized water and wet mill them in a ball mill for 18 hours, then dry the ball milled raw materials at 100°C for 5 hours, pass through a 50-mesh sieve, and press them under a pressure of 120Mpa. After the molded sample is kept at 500°C for 2.5 hours to remove the molding agent, it is continuously heated to 1350°C and sintered in the air under normal pressure for 180 minutes, and then cooled with the furnace to obtain a highly dense WO 3 -ZnO composite target, its related performance parameters are shown in figure 1 .

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Abstract

The invention discloses a preparation method of a WO3ZnO composite target. The invention is characterized in that a low cost normal pressure sintering process is employed for preparing the WO3-ZnO composite target with purity higher than 99.9%, relative density is greater than 95% and bending strength greater than 60 Mpa, without using any sintering aid. The target is particularly suitable for preparing a WO3-ZnO composite film, and has broad application in the fields of photocatalytic purification, gas sensor and photoelectric conversion.

Description

technical field [0001] The invention belongs to inorganic non-metal elements and compounds thereof. Background technique [0002] Tungsten oxide / zinc oxide composite thin film is a widely researched functional material. By adjusting the molar ratio of zinc oxide and tungsten oxide in the composite film, its photocatalytic performance, gas-sensing performance, electrochromic performance, etc. can be effectively regulated. Such materials have broad application prospects in the fields of optical glass, flat panel display, photoelectric conversion, electrochromism, photochromism, photocatalytic sewage purification, photocatalytic sterilization, and gas sensors. [0003] The preparation methods of tungsten oxide / zinc oxide composite films mainly include: sol-gel, electrolytic deposition, chemical vapor deposition, spray pyrolysis, anodic oxidation, physical vapor deposition and other methods. Among them, the film prepared by physical vapor deposition has high bonding strength w...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/453C04B35/495C04B35/622
Inventor 杨海涛张忠健尚福亮傅崇伟高玲赵声志刘存奇饶承毅
Owner SHENZHEN UNIV
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