Dewaxing cleaning agent for sapphire substrate

Abstract

The invention relates to a preparation method of a dewaxing cleaning agent for a sapphire substrate, and is characterized in that the dewaxing cleaning agent for the sapphire substrate contains a starch glycoside surfactant, other surfactants, a cosolvent, a metal complex, a suspending agent, a water quality softener or a hard water resistant agent, a corrosion inhibitor and pure water; the dewaxing cleaning agent for the sapphire substrate is characterized by containing 5-15 wt% of the starch glycoside surfactant, 5-20 wt% of the other surfactants, 3-5 wt% of the cosolvent, 3-5 wt% of the metal complex, 0.01-1 wt% of the water quality softener or the hard water resistant agent, 0.5-1 wt% of the suspending agent, 10-20 wt% of a sapphire substrate corrosive agent and a proper amount of pure water; the dewaxing cleaning agent for the sapphire substrate is a water-based environmentally-friendly cleaning agent, and the cleaning agent can be degraded by self within 15 days after cleaning; and the cleaning requirement can be reached just with cleaning for one time, the production efficiency is improved, and with addition of the corrosion inhibitor, the cleaning agent is ensured not to cause severe corrosion to the sapphire surface in the cleaning process.

Description

technical field [0001] The invention relates to a preparation method of a wax-removing cleaning agent for a sapphire substrate. Background technique [0002] Sapphire single crystal (Sapphire), also known as white gemstone, is transparent and has the same optical properties, mechanical properties and chemical properties as natural gemstones. It has good thermal properties, excellent electrical properties and dielectric properties, and is chemically resistant. , high infrared transmittance, good wear resistance, hardness second only to diamond, Ta Mok's 9, still has good stability at high temperature, melting point is 2030 ℃, so it is widely used in industry , national defense, scientific research and other fields, such as optoelectronics, communications, GaN light-emitting diode (LED) substrates, military missile warhead shells, precision instruments and meters, infrared light-transmitting materials in the aerospace industry, laser windows and mirrors, semiconductor silicon ...

AI Technical Summary

Problems solved by technology

At present, there are three main types of dewaxing cleaning agents for sapphire substrates: solvent type, semi-aqueous type and water-based type. Liquid is difficult to handle and other problems; and most of the sapphire substrates currently have the following disadvantages: the cleaning time is long, usually 10-20 minutes, and the cleaning effect is not ideal, that is, residues will appear on the surface of the sapphire after cleaning. The surface of sapphire is severely corroded, resulting in a decrease in the cleaning yield