Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Laser Noise Elimination in Transmission Thermometry

A technology of lasers and laser diodes, applied in the field of devices for annealing substrates, can solve problems such as display noise

Inactive Publication Date: 2018-06-19
APPLIED MATERIALS INC
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The temperature of the lasing medium affects the wavelength emitted by the laser, but even temperature-controlled lasers can exhibit noise due to, for example, mode-hopping

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Laser Noise Elimination in Transmission Thermometry
  • Laser Noise Elimination in Transmission Thermometry
  • Laser Noise Elimination in Transmission Thermometry

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0017] figure 1 Is a schematic illustration of an apparatus 100 for determining the thermal state of a substrate 110 according to one embodiment. The apparatus 100 comprises: a source 102 of coherent thermal radiation 112; a decorrelator 104 which converts the coherent thermal radiation 112 into decorrelated thermal radiation 114; a detector 106 which detects the transmitting radiation 116; and a data processor 108, such as a computer, for converting the signal from the detector 106 into an indication of the thermal state of the substrate 110.

[0018] Source 102 may be a laser, such as a laser diode, or source 102 may be another superluminescent source, such as a light emitting diode (LED). To accurately detect the thermal state of the substrate, source 102 is typically a source that emits a narrow spectrum of radiation such that absorption of said radiation by the substrate can be accurately determined. In most embodiments, source 102 is a laser diode. Laser diodes emitti...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus comprises: a source of temperature-indicative radiation; a detector for the temperature-indicative radiation; and a decorrelator disposed between the source of temperature-indicative radiation and the temperature-indicative radiation. in the optical path between the detectors. The decorrelator may be a broadband amplifier and / or a mode scrambler. The broadband amplifier can be a broadband laser, Bragg grating, fiber Bragg grating, Raman amplifier, Brillouin amplifier or a combination of these devices. The decorrelator is selected to emit radiation that is at least partially transmitted through the substrate being monitored. If the decorrelator is a gain driven device, then the source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator.

Description

technical field [0001] Embodiments described herein relate to apparatus and methods for annealing a substrate. More particularly, the devices and methods described herein relate to temperature measurement using radiative transfer. Background technique [0002] Transmission pyrometry is a common way to detect the thermal state of a substrate. Thermal processing chambers typically expose the substrate to intense, incoherent or coherent radiation to elevate the temperature of the substrate, either over the entire substrate or over a surface area or portion of the substrate. The radiation used to heat the substrate creates a strong background radiation environment in the chamber. [0003] High power radiation is used to detect the thermal state of the substrate because it can be distinguished from background radiation in the chamber. Lasers are often used because they offer high power and because they offer the opportunity to select a specific wavelength that is most suitable...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01J5/02H01L21/324
CPCG01J5/0896G01J1/0459G01J5/0007G01J5/06G01J5/58G01J5/0821B23K26/00G01N21/59G01J5/02
Inventor 季平·李阿伦·缪尔·亨特托马斯·霍
Owner APPLIED MATERIALS INC
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com