Microwave phase shifter based on micro-mechano-electronic technology

Abstract

The invention discloses a microwave phase shifter based on a micro-mechano-electronic technology. The microwave phase shifter comprises a distribution parameter transmission line (1), capacitor drivers (3) and a dielectric substrate (2). The capacitor drivers (3) are arranged on the dielectric substrate (2). One end of each capacitor driver (3) is connected with a corresponding grounding wire of the distribution parameter transmission line (1) through a U-shaped beam (9), the other end of each capacitor driver (3) is connected with a driving power supply, interdigital capacitors (8) are evenly loaded between a signal wire (7) and the grounding wires, and therefore the distribution parameter transmission line (1) is formed. The microwave phase shifter has the advantages that electrostatic force is generated through the interdigital capacitors, the grounding wires of the distribution parameter transmission line shift, the capacitance of the interdigital capacitors changes correspondingly, the phase of a signal also changes, the phase is changed continuously and an infinite number of phase states are realized when driving voltage continuously changes, and the microwave phase shifter is simple in structure and convenient to control.

Description

technical field [0001] The invention relates to the field of micro-electromechanical, in particular to a microwave phase shifter based on micro-mechanical electronic technology. Background technique [0002] Phase shifters can adjust the phase of waves, and are widely used in phased array radar, missile attitude control, communication, instrumentation and other fields. The use of phase shifters can form phased array antennas, balanced mixers, power dividers and other microwave functional circuits. Its working principle is different according to different configurations. For example, in transistor circuits, a control signal can be added to the input to control the phase shift; in some circuits, the delay of the resistance-capacitance circuit is used to achieve phase shift; Can use the internal timer to achieve the purpose of phase shifting. [0003] The digital MEMS electronic phase shifter in the prior art changes the distributed parameter capacitance of the distributed pa...

AI Technical Summary

Problems solved by technology

Since the MEMS bridge only has two states, the upper and lower states, the phase shifter in the prior art can only realize a limited phase state. If multiple phase states are to be realized, multiple control ports are required, which not only complicates the control, but also makes the phase shifter The structure becomes complicated. During processing, silicon surface processing technology is used, and the process is complicated