AlGaAs/GaInAs/Ge continuous spectrum solar battery
A solar cell and spectrum technology, applied in photovoltaic power generation, circuits, electrical components, etc., can solve the problems of difficult battery material quality and low yield, and achieve the effect of improving photoelectric conversion efficiency and mature technology
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[0021] Embodiment one: see attached figure 1 Shown, the preparation method of AlGaAs / GaInAs / Ge continuous spectrum solar cell comprises the following steps:
[0022] S1 uses a p-type Ge substrate 1 with a thickness of 130-230un and a doping concentration of 1×10 17 cm -3 -1×10 18 cm -3 , as the base layer of Ge bottom battery.
[0023] Diffusion of P on the surface of the S2Ge substrate forms an n-type GeEmitter layer 2 to obtain a bottom cell. The thickness of the Emitter layer is 60-200nm, and the doping concentration is 6×10 18 cm -3 -3×10 19 cm -3 .
[0024] S3 growth of 200-300nm n-type GaInP 2 Window layer 3, the doping concentration is 5×10 18 cm -3 .
[0025] S4 growth degenerate n-type doping concentration greater than 1×10 19 cm -3 and an AlGaAs layer 4 with a thickness of 10nm to form a tunnel junction to connect the middle cell and the bottom cell.
[0026] S5 grows degenerate p-type doping greater than 6×10 19 cm -3 , a GaInP layer 5 with a thickn...
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