A polarization-isolated dual-axis digital photoelectric autocollimator
A photoelectric autocollimator and autocollimator technology, which is applied in the direction of instruments, optical devices, measuring devices, etc., can solve the problem of poor realization of two-dimensional angle measurement, poor measurement accuracy of single-axis autocollimator, Can not meet the high-speed measurement and other problems, to achieve the effect of improving the utilization rate of light energy, improving the resolution and response ability, and improving the anti-interference ability
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[0024] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0025] The invention provides a polarization-isolated dual-axis digital photoelectric autocollimator, which can automatically identify the target, has higher resolution than the traditional photoelectric autocollimator, and can be more sensitive through dual-axis measurement. The deviation of the two-dimensional angle of the measured target is detected.
[0026] A polarization-isolated dual-axis digital photoelectric autocollimator, such as figure 1As shown, it includes a first light source 1, a second light source 2, a first reticle 3, a second reticle 4, a first light source converging lens 5, a second light source converging lens 6, a first dichroic prism 7, a second Dichroic prism 8, telephoto main mirror 9, target reflection surface 10, secondary mirror 11, PSD detector 12 and 1 / 4 wave plate 13; Wherein, described first reticle 3 and se...
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