Chromium-aluminum alloy target and manufacturing method thereof

A technology of chrome-aluminum alloy and target material, which is applied in the field of target material manufacturing, can solve the problem that the coating material is difficult to meet, and achieve the effect of controlling the oxygen content
CN104451277AActive Publication Date: 2015-03-25SHANDONG HAO XUAN ELECTRONICS CERAMIC MATERIALS
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANDONG HAO XUAN ELECTRONICS CERAMIC MATERIALS
Publication Date
2015-03-25

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Abstract

The invention belongs to the technical field of target manufacturing, and particularly relates to a chromium-aluminum alloy target and a manufacturing method of the chromium-aluminum alloy target. Chromium and aluminum are adopted as main elements of the chromium-aluminum alloy target. The target further comprises at least two elements of Co, Ti, Ta, W, Nb, Mo, Zr, V, B, Si, Y, La, Ce and Se. Nitrided, carbonized and nitrided-carbonized composite membrane layer materials of multiple forms can be formed by adding a variety of elements. A product can be further compacted better based on the improved technology for heating treatment. The oxygen content is effectively controlled based on the improved powder mixing and degassing technology.
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Description

technical field

[0001] The invention belongs to the technical field of target material manufacturing, and in particular relates to a chromium-aluminum alloy target material and a preparation method thereof. Background technique

[0002] Chromium-aluminum alloy targets are mainly used in the tool coating industry. The target is generally manufactured by hot pressing or isostatic pressing. Among them, the cost of hot pressing targets is low but the density is low, and the hot isostatic pressing targets have high density. The advantage of being able to mass produce. During the use of the target, reactive sputtering is generally carried out in an environment such as nitrogen or acetylene to form a coating. Coating materials must have high hardness, good wear resistance, stable chemical properties, no chemical reaction with workpiece materials, heat resistance and oxidation resistance, low friction coefficient, and strong adhesion to the substrate. Obviously, a single coating m...

Claims

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