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A Method for Improving Detection Accuracy and Durability of Quartz Crystal Microbalance

A technology of quartz crystal and microbalance, which is applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problem of not using quartz crystal microbalance, etc., and achieve the effect of improving accuracy, improving durability and reducing interference

Inactive Publication Date: 2017-10-17
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In recent years, many people have devoted themselves to the study of ZnO or TiO 2 Switching between superhydrophobic and superhydrophilic in thin films, but so far, has not been applied to quartz crystal microbalances

Method used

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  • A Method for Improving Detection Accuracy and Durability of Quartz Crystal Microbalance
  • A Method for Improving Detection Accuracy and Durability of Quartz Crystal Microbalance
  • A Method for Improving Detection Accuracy and Durability of Quartz Crystal Microbalance

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Example 1: Preparation of anatase TiO on the surface of a quartz crystal microbalance 2 / ZnO composite nanorod array as a sensitive film, including the following steps:

[0029] 1. Preparation of ZnO seed liquid:

[0030] Zinc acetate and ethanolamine were added to the ethylene glycol methyl ether solution in an equimolar ratio, and the two solutions were named A and B respectively, and were magnetically stirred at 60°C for 30 minutes, and then the B solution was slowly stirred under the action of magnetic stirring. Join in the A solution, adjust the Zn in the mixed solution by adding the amount of ethylene glycol methyl ether solution 2+ The concentration is 0.5mol / L. Then let the mixed solution continue to stir at 60°C, and add an appropriate amount of dispersant PEG after about 2 hours 400 In this way, the ZnO sol was obtained, the pH value of which was 7.39, and then the ZnO sol was statically aged at room temperature for 24 hours, which was the ZnO seed liquid f...

Embodiment 2

[0047] Example 2: Preparation of anatase TiO on the surface of a quartz crystal microbalance 2 / ZnO composite nanorod array as a sensitive film, the steps are as follows:

[0048] 1. Preparation of ZnO seed liquid: use zinc nitrate dihydrate Zn(CH 3 COO) 2 2H 2 O is used as a reaction precursor, ethanolamine (MEA) is used as a stabilizer, and ethylene glycol methyl ether is used as a solvent to prepare (Zn 2+ ) ZnO sol with a concentration of 0.3mol / L is used as the ZnO seed liquid;

[0049] 2. Form ZnO seeds on the surface of the quartz crystal oscillator by spin coating: coating time is 60s, dripping speed is 1ml / min, after coating, use infrared heating method to heat up to 300°C, heat preservation and sintering for 0.5h, stop heating, and cool naturally . A substrate with ZnO seed crystals is obtained on the surface of the quartz crystal oscillator.

[0050] 3. Grow nano-rod-shaped ZnO gas-sensing film layer by hydrothermal method: prepare zinc nitrate solution and he...

Embodiment 3

[0054] Example 3: Preparation of anatase TiO on the surface of a quartz crystal microbalance 2 / ZnO composite nanorod array as a sensitive film, the steps are as follows:

[0055] 1. Preparation of ZnO seed liquid: use zinc nitrate dihydrate Zn(CH 3 COO) 2 2H 2 O is used as a reaction precursor, ethanolamine (MEA) is used as a stabilizer, and ethylene glycol methyl ether is used as a solvent to prepare (Zn 2+ ) ZnO sol with a concentration of 0.3mol / L is used as the ZnO seed liquid;

[0056] 2. Form ZnO crystal seeds on the surface of the quartz crystal oscillator by spin coating: the coating time is 120s, and the dripping speed is 0.5ml / min. After coating, the temperature is raised to 200°C by infrared heating method, and then heat preservation and sintering for 1h, stop heating, and cool naturally . A substrate with ZnO seed crystals is obtained on the surface of the quartz crystal oscillator.

[0057] 3. Grow nanorod-shaped ZnO gas-sensitive film layer by hydrothermal...

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Abstract

The invention discloses a method for improving the detection accuracy and durability of a quartz crystal microbalance, which is realized by preparing an anatase type TiO2 / ZnO composite nanorod array as a quartz crystal microbalance sensitive film. The steps are as follows: after prefabricating ZnO crystal seeds, adopting a hydrothermal method to prepare a ZnO gas-sensitive thin film on a quartz crystal vibrating plate; preparing a TiO2 sol, and further coating the quartz crystal vibrating plate forming a ZnO nanorod array to form a TiO2 / ZnO composite nanorod array. The invention utilizes the conversion between superhydrophobicity and superhydrophilicity of the anatase TiO2 / ZnO nanocomposite film and the photocatalytic performance of the semiconductor film to effectively reduce the loss of water molecules in the process of detecting organic gas molecules in the quartz crystal microbalance. interference, improve the detection accuracy, and photocatalytically degrade the excessive organic gas molecules on its surface, and improve the durability of the quartz crystal microbalance.

Description

technical field [0001] The invention belongs to the field of pollution monitoring, in particular to preparing TiO on the surface of quartz crystal microbalance (QCM) 2 / ZnO nanocomposite thin film, and then improve its detection accuracy and durability of organic gas molecules. Background technique [0002] QCM is a sensitive quality sensor, which has an extremely sensitive frequency response to the change of crystal surface quality, and its frequency drop value has a quantitative relationship with the quality of wafer surface deposition: [0003] [0004] In the formula: Δm is the change of the mass deposited on the wafer, the unit is g; A is the area of ​​the pollutant deposited on the wafer, the unit is cm 2 ; Δf is the frequency change, the unit is Hz; F is the fundamental frequency of the quartz crystal microbalance, the unit is Hz; C is a constant related to the characteristics of quartz, for the P-P quartz crystal with a cutting angle of 35°18', in At 25°C, C=8.8...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N5/00
Inventor 魏强李薇王绍丹许伟泽刘浩锐
Owner TIANJIN UNIV
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