Hard and tough nano composite ZrAlCuN coating and preparation method thereof
A nano-composite, hard and tough technology, used in coatings, metal material coating processes, ion implantation plating and other directions to achieve the effect of improving hardness
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Embodiment 1
[0043] In this embodiment, the titanium alloy Ti6Al4V is used as the substrate, and the magnetron sputtering technology is used to deposit the ZrAlCuN coating to improve the erosion resistance of the titanium alloy. Concrete preparation process is as follows:
[0044] (1) Preliminary cleaning of titanium alloy: use metal cleaning agent to ultrasonically clean the sample for 15 minutes, then rinse with tap water, then rinse in deionized water, and then put in 0.5% dilute H 3 PO 4 The middle surface is activated for 2 minutes, rinsed again, ultrasonically cleaned in acetone for 15 minutes, dried and placed in a vacuum chamber.
[0045](2) Cleaning by argon sputtering in the vacuum chamber: After heating to 200° C., argon gas (volume percentage >99.99%) is introduced into the vacuum chamber to increase the pressure in the vacuum chamber to 1.0 Pa. At this time, the bias power supply was turned on, and under the action of a negative bias voltage of 1200V, the argon gas was disch...
Embodiment 2
[0054] In this embodiment, the high-speed steel is used as the substrate, and the ZrAlCuN coating is deposited by magnetron sputtering technology to improve the hardness and impact load resistance of the high-speed steel. Concrete preparation process is as follows:
[0055] (1) Preliminary cleaning of titanium alloys: Use a metal cleaning agent to ultrasonically clean the sample for 15 minutes, then rinse it with tap water, then rinse it in deionized water, and then put it into 1% dilute HCl for surface activation for 2 minutes, and rinse it again. Sonicate in acetone for 15 minutes, dry and place in a vacuum chamber.
[0056] (2) Cleaning by argon sputtering in the vacuum chamber: after heating to 400° C., argon gas (volume percentage >99.99%) is introduced into the vacuum chamber to increase the pressure in the vacuum chamber to 3.0 Pa. At this time, the bias power supply was turned on, and under the action of a negative bias voltage of 1000V, the argon gas was discharged t...
Embodiment 3
[0065] In this embodiment, the high-speed steel is used as the substrate, and the ZrAlCuN coating is deposited by magnetron sputtering technology to improve the hardness and impact load resistance of the high-speed steel. Concrete preparation process is as follows:
[0066] (1) Preliminary cleaning of high-speed steel: Use a metal cleaning agent to ultrasonically clean the sample for 15 minutes, then rinse it with tap water, then rinse it in deionized water, and then put it into 0.8% dilute HCl for surface activation for 2 minutes, and rinse it again Sonicate in acetone for 15 minutes, dry and place in a vacuum chamber.
[0067] (2) Cleaning by argon sputtering in the vacuum chamber: after heating to 300° C., argon gas (volume percentage >99.99%) is introduced into the vacuum chamber to increase the pressure in the vacuum chamber to 2.0 Pa. At this time, the bias power supply was turned on, and under the action of a negative bias voltage of 1000V, the argon gas was discharged...
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