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Method for rapidly preparing fine-grain tungsten-titanium alloy

A tungsten-titanium alloy and fine-grain technology is applied in the field of rapid preparation of fine-grained tungsten-titanium alloys, which can solve the problems of long sintering time and easy grain growth, and achieve the effect of less titanium-rich phase, promotion of diffusion, and fine grain size.

Inactive Publication Date: 2015-04-29
XIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a method for rapidly preparing fine-grained tungsten-titanium alloy, which solves the problem that the sintering time required by the existing sintering method is too long and the crystal grains are easy to grow

Method used

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  • Method for rapidly preparing fine-grain tungsten-titanium alloy

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Step 1, put tungsten powder with a particle size of 6-8 μm into the planetary high-energy ball mill tank, add 5% alcohol as a dispersant, add WC balls at a ball-to-material ratio of 15:1, and then pre-pump the ball mill tank Nitrogen is filled after the vacuum, the speed of the ball mill is 400r / min, and the ball milling time is 6h;

[0025] Step 2, mix the ball-milled tungsten powder and Ti powder evenly on a V-shaped mixer;

[0026] Step 3, put the mixed powder into the discharge plasma sintering furnace, start heating when the vacuum reaches 6Pa, raise the temperature to 1300°C at a heating rate of 100°C / s and keep it for 10 minutes, then cool down with the furnace, and the fine powder can be obtained in a short time. Crystalline tungsten-titanium alloy.

[0027] The fine-grained tungsten-titanium alloy obtained in Example 1 was wire-cut and machined to prepare a metallographic sample, and the microstructure was observed by a scanning electron microscope. It was fou...

Embodiment 2

[0029] Step 1, put tungsten powder with a particle size of 6-8 μm into the planetary high-energy ball mill tank, and add 5% alcohol as a dispersant, add WC balls at a ball-to-material ratio of 15:1, and then pre-pump the ball mill tank Nitrogen is filled after the vacuum, the speed of the ball mill is 400r / min, and the ball milling time is 10h;

[0030] Step 2, mix the ball-milled tungsten powder and Ti powder evenly on a V-shaped mixer;

[0031] Step 3, put the mixed powder into the discharge plasma sintering furnace, start heating when the vacuum reaches 6pa, raise the temperature to 1400°C at a heating rate of 100°C / s and keep it for 5 minutes, then cool down with the furnace, and the fine powder can be obtained in a short time. Crystalline tungsten-titanium alloy.

[0032] The fine-grained tungsten-titanium alloy obtained in Example 2 was wire-cut and machined to prepare a metallographic sample, and the microstructure was observed by a scanning electron microscope. It was...

Embodiment 3

[0034] Step 1, put tungsten powder with a particle size of 6-8 μm into the planetary high-energy ball mill tank, and add 5% alcohol as a dispersant, add WC balls at a ball-to-material ratio of 15:1, and then pre-pump the ball mill tank Nitrogen is filled after the vacuum, the speed of the ball mill is 400r / min, and the ball milling time is 15h;

[0035] Step 2, mix the ball-milled tungsten powder and Ti powder evenly on a V-shaped mixer;

[0036] Step 3: Put the mixed powder into the discharge plasma sintering furnace, start heating when the vacuum reaches 6Pa, raise the temperature to 1500°C at a heating rate of 100°C / s and keep it for 3 minutes, then cool down with the furnace, and the fine powder can be obtained in a short time. Crystalline tungsten-titanium alloy.

[0037] The fine-grained tungsten-titanium alloy obtained in Example 3 was wire-cut and machined to prepare a metallographic sample, and the microstructure was observed by a scanning electron microscope. It was...

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Abstract

The invention discloses a method for rapidly preparing a fine-grain tungsten-titanium alloy. The method comprises the following steps: carrying out high-energy ball milling on tungsten powder, adding titanium powder, and mixing evenly; and carrying out spark plasma sintering on the mixed powder to obtain the tungsten-titanium alloy. According to the method for rapidly preparing the fine-grain tungsten-titanium alloy disclosed by the invention, SPS sintering is adopted after the tungsten powder is mixed with the titanium powder, so that the tungsten-titanium alloy can be rapidly obtained; growth of crystalline grains is avoided; impurity elements in the alloy are reduced; diffusion of atoms is promoted; and the prepared tungsten-titanium alloy is small in crystalline grain, high in compactness, uniform in tissue and few in titanium-rich phases.

Description

technical field [0001] The invention belongs to the technical field of alloy preparation, and in particular relates to a method for rapidly preparing fine-grained tungsten-titanium alloy. Background technique [0002] As the sputtering target of copper wiring diffusion barrier layer, WTi alloy has many requirements in terms of structure and performance. A large number of experimental results show that the grain size and titanium-rich phase content of WTi alloy structure are the main factors affecting the performance of the barrier layer. Existing studies have shown that the smaller the grain size of the sputtering target and the lower the content of titanium-rich phase, the better the performance of the prepared WTi film. The finer and more uniform the grains of the target material, the less the rich phase content, the faster the sputtering rate, the better the thickness uniformity of the sputtered deposited film, and the fewer the number of pollution particles. Therefore, ...

Claims

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Application Information

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IPC IPC(8): C22C1/04C22C27/04
Inventor 梁淑华罗亚涛代卫丽邹军涛杨晓红杨卿
Owner XIAN UNIV OF TECH