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Preparation method of aplitic tungsten-titanium alloy

A tungsten-titanium alloy and fine-grained technology, which is applied in the field of fine-grained tungsten-titanium alloy preparation, can solve the problems of restricting the commercialization of WTi alloy grain refinement alloys, high requirements for equipment and operators, and grain growth. Good barrier effect, reduced dynamic conditions, high density effect

Inactive Publication Date: 2015-05-13
XIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The sintering temperature of the above-mentioned various sintering methods is above 1300°C, and the higher sintering temperature makes the grains easy to grow
Although the hot isostatic pressing sintering temperature is low, the equipment used is expensive, and the requirements for equipment and operators are relatively high.
These all limit the refinement of WTi alloy grains and the commercialization of the alloy.

Method used

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  • Preparation method of aplitic tungsten-titanium alloy
  • Preparation method of aplitic tungsten-titanium alloy

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preparation example Construction

[0019] The preparation method of the fine-grained tungsten-titanium alloy of the present invention comprises high-energy ball milling of tungsten powder, adding titanium hydride powder and mixing uniformly, pressing into a green body, and hot extrusion quenching after vacuum low-temperature sintering to obtain the fine-grained tungsten-titanium alloy.

[0020] Specifically follow the steps below:

[0021] Step 1, put tungsten powder with a particle size of 6-8μm into the ball mill tank, and add 5% alcohol as a dispersant, add WC balls according to the ball-to-material ratio of 10-20:1, and then pre-pump the ball mill tank Rinse into argon after vacuuming, put the sealed ball mill jar into a planetary high-energy ball mill for ball milling, the speed is 400r / min, and the ball milling time is 6-15h;

[0022] Step 2, mix the ball-milled tungsten powder and titanium hydride powder on a V-type mixer, and then press the mixed powder into a green body at a pressure of 40t on a TM-106...

Embodiment 1

[0030] Step 1, put tungsten powder with a particle size of 6-8 μm into the ball mill tank, add 5% alcohol as a dispersant, add WC balls according to the ball-to-material ratio of 20:1, and then pre-vacuumize the ball mill tank Rush into argon, put the sealed ball mill jar into a planetary high-energy ball mill for ball milling, the speed is 400r / min, and the ball milling time is 10h;

[0031] Step 2, mix the ball-milled tungsten powder and titanium hydride powder on a V-type mixer, and then press the mixed powder into a green body at a pressure of 40t on a TM-106 hydraulic press;

[0032] Step 3, put the green body pressed in step 2 into a vacuum sintering furnace, and evacuate to 10 -3 Heating after Pa, raising the temperature to 500°C at a heating rate of 10°C / s for 2 hours, and cooling with the furnace to obtain a sintered body of WTi alloy;

[0033] Step 4, put the sintered body of WTi alloy obtained in step 3 into a stainless steel sheath, then vacuumize and weld the she...

Embodiment 2

[0036] Step 1, put tungsten powder with a particle size of 6-8 μm into the ball mill tank, add 5% alcohol as a dispersant, add WC balls according to the ball-to-material ratio of 15:1, and then pre-evacuate the ball mill tank Rush into argon, put the sealed ball mill jar into a planetary high-energy ball mill for ball milling, the speed is 400r / min, and the ball milling time is 15h;

[0037] Step 2, mix the ball-milled tungsten powder and titanium hydride powder on a V-type mixer, and then press the mixed powder into a green body at a pressure of 40t on a TM-106 hydraulic press;

[0038] Step 3, put the green body pressed in step 2 into a vacuum sintering furnace, and evacuate to 10 -3 Heating after Pa, raising the temperature to 550°C at a heating rate of 10°C / s for 1.5h, and cooling with the furnace to obtain a sintered body of WTi alloy;

[0039]Step 4, put the sintered body of WTi alloy obtained in step 3 into a stainless steel sheath, then vacuumize and weld the sheath, ...

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Abstract

The invention discloses a preparation method of aplitic tungsten-titanium alloy. The preparation method comprises the following steps: after performing high-energy ball milling on tungsten powder, adding titanium hydride powder, and performing uniform mixing; then performing compression so as to form a green body, and after performing vacuum low-temperature sintering, performing thermal extrusion and quenching so as to obtain the aplitic tungsten-titanium alloy. Through the use of the preparation method disclosed by the invention, the defects of the loss of the ball milling effect and the grain growth, which are caused by the high-temperature sintering, are overcome, the obtained tungsten-titanium alloy is fine in crystal grains, high in density and fine and uniform in rich titanium phases, the occupied area is small, and a new method of the aplitic tungsten-titanium alloy is provided.

Description

technical field [0001] The invention belongs to the technical field of preparation of refractory alloy targets, and in particular relates to a preparation method of fine-grained tungsten-titanium alloy. Background technique [0002] The WTi alloy used as the sputtering target of the copper wiring diffusion barrier has strict requirements on the grain size of its internal structure. For the target material of the same composition, the finer and more uniform the grain, the faster the sputtering rate, and the sputtering deposit The thickness uniformity of the deposited film is better. Existing studies have shown that the smaller the grain size, the better the performance of the prepared film. Therefore, controlling the grain size of the WTi alloy target is one of the key factors to obtain a good thin film. [0003] The factors affecting the grain size of WTi alloy target include the preparation method of the target and its process parameters. At present, in order to obtain W...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C1/05C22F1/18C23C14/34
Inventor 梁淑华代卫丽杨卿邹军涛杨晓红
Owner XIAN UNIV OF TECH
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