A method and equipment for electron beam smelting polysilicon deoxidation and ingot coupling

Abstract

The invention belongs to the field of metallurgic melting, and especially relates to an electron beam melting polysilicon deoxygenation and ingot casting coupling method and an apparatus thereof. The method comprises the following steps: carrying out vacuum pumping on a furnace body and electron guns, starting a melting electron gun to carry out electron beam melting on a polysilicon material, and melting to preliminarily remove impurity oxygen; maintaining a liquid state under the action of a radiation electron gun to further remove oxygen, guiding the obtained material to enter an ingot casting device through a water cooled conveyor belt, and carrying out oriented crystal growth to obtain polysilicon cast ingots. The apparatus comprises an electron beam melting assembly and an ingot casting coupling assemble, the ingot casting coupling assembly comprises the ingot casting device, the ingot casting device is positioned under the water cooled conveyor belt, and the flow guiding opening of the water cooled conveyor belt is positioned over the center of the quartz crucible of the ingot casting device. The electron beam melting deoxygenation method and a use thereof are provided for the first time, electron beam deoxygenation is realized, and ingot casting coupling is combined, so energy required by ingot casting heating of the raw material is reduced, and the production efficiency is greatly improved.

Description

technical field [0001] The invention belongs to the field of metallurgical smelting, and in particular relates to a method for coupling impurity removal and ingot casting in electron beam smelting polysilicon, and also relates to its equipment. Background technique [0002] At present, my country has become the world's largest energy production and consumption country, but the per capita energy consumption level is still very low. With the continuous development of the economy and society, my country's energy demand will continue to grow. In response to the current energy shortage, countries around the world are thinking deeply, and are working hard to improve energy efficiency, promote the development and application of renewable energy, and reduce the impact on energy consumption. Reliance on imported oil to enhance energy security. [0003] As one of the important development directions of renewable energy, solar photovoltaic power generation has developed rapidly in rece...

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Problems solved by technology

[0009] However, in the prior art, the removal effect of oxygen element is not good

For the removal method of oxygen impurities, the invention patent CN200810070925 was retrieved, a method for reducing the content of oxygen and carbon in metal silicon. The invention adopts blowing oxygen, hydrogen and water vapor into the silicon liquid to make hydrogen and oxygen react in the silicon liquid. Local high temperature is generated to remove oxygen and carbon elements in the silicon liquid with gas discharge, but this method needs to feed oxygen and hydrogen in the molten state of silicon, the operation is difficult and dangerous, and the oxygen removal effect is not good

[0010] At the same time, after effectively reducing the oxygen content in the polysilicon ingot raw material, the polysilicon ingot can be obtained through the directional growth process, but the previous ingot casting method is to directly heat the ingot raw material, which cannot realize the ingot coupling, which takes a long time and consumes energy Big

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