Zirconia and alumina gradient composite coat and production method thereof

A composite coating and zirconia technology, which is applied in coating, metal material coating process, gaseous chemical plating, etc., can solve the problems of application limitation, glass embrittlement, cracking, etc.

Inactive Publication Date: 2015-06-17
GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

SCB glass has good hydrogen barrier performance, but SiO 2 It will react with hydrogen at 300°C to ca

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] A zirconia / alumina gradient composite coating was deposited on 316 stainless steel by metal-organic chemical vapor deposition. 316 stainless steel was ultrasonically cleaned with acetone, alcohol and deionized water, and placed in the reaction chamber. Zirconium acetylacetonate and aluminum acetylacetonate were used as metal precursors, Ar was used as carrier gas, O 2 as a reactive gas. The volatilization temperature of zirconium acetylacetonate is 180° C., and the flow rate of Ar carrier gas passing through zirconium acetylacetonate is 30 sccm. The volatilization temperature of aluminum acetylacetonate is 120° C., and the flow rate of Ar carrier gas passing through aluminum acetylacetonate is 10 sccm. o 2 The flow rate is 10 sccm, the deposition temperature is 500° C., the deposition time is 0.5 hour, and the pressure of the reaction chamber is 1200 Pa.

[0018] By changing the volatilization temperature of zirconium acetylacetonate and aluminum acetylacetonate and...

Embodiment 2

[0021] Zirconia / alumina gradient composite coatings were deposited on 304 stainless steel by DC reactive magnetron co-sputtering. Independent metal zirconium and aluminum are used as target materials, and independent DC power supplies are used for power supply, Ar is used as the glow gas, and O 2 as a reactive gas. 304 stainless steel is ultrasonically cleaned with acetone, alcohol and deionized water, and then put into the vacuum chamber. When the back vacuum is better than 2×10 -3 After Pa, clean with Ar plasma bombardment for 15 min in the sputtering chamber. Control Ar / O 2 =120 / 30 (flow ratio), total pressure 0.4Pa, target-base distance 100mm, base bias voltage -80V. Multilayer gradient composite coatings with different composition ratios were obtained by adjusting the sputtering power and deposition time of the zirconium and aluminum targets. The sputtering power of the zirconium target and the aluminum target was 3200W and 6000W, respectively, for 20min. Then adjus...

Embodiment 3

[0024]Zirconia / alumina gradient composite coatings were deposited on 304 stainless steel by radio frequency reactive magnetron sputtering. Independent metal zirconium / yttrium alloy (the content of Y is 18wt%), aluminum as the target material, using independent radio frequency power supply for power supply, Ar as the starting gas, O 2 as a reactive gas. 304 stainless steel is ultrasonically cleaned with acetone, alcohol and deionized water, and then put into the vacuum chamber. When the back vacuum is better than 7×10 -3 After Pa, the substrate was cleaned by Ar plasma bombardment for 15 min in the sputtering chamber. Control Ar / O 2 =50 / 20 (flow ratio), the total pressure is 1.5Pa, the target-base distance is 50mm, and the base bias is -80V. Multilayer gradient composite coatings with different composition ratios were obtained by adjusting the sputtering power of the zirconium / yttrium alloy target and the aluminum target. The sputtering power of the zirconium target and th...

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Abstract

The invention relates to a zirconia and alumina gradient composite coat and a production method thereof. The coat comprises composite layers composed of zirconia and alumina according to different mass percentage ratios, and the composite layers composed of zirconia and alumina are laid on a steel substrate. The composite coat can be produced through a metal organic matter chemical vapor deposition technology or a reactive magnetron co-sputtering technology. The zirconia and alumina gradient composite coat combines the hydrogen resistance and penetration characteristics of zirconia and alumina, and the thermal expansion coefficient of the composite coat can be changed by adjusting the proportions of zirconia and alumina in the composite coat to improve the thermal physical matching performance between the composite coat and the substrate, so the thermal cycle use performance of the composite coat is improved.

Description

technical field [0001] The invention relates to a gradient composite coating of zirconia and alumina and a preparation method thereof. The composite coating can be applied to the hydrogen permeation barrier coating of steel structural parts in the field of hydrogen, and can also be applied to the wear resistance of steel structural parts , Corrosion-resistant coating. Background technique [0002] Hydrogen permeation barrier coating is a type of coating material that can reduce and block the hydrogen permeation of structural components, and is a key material in the field of hydrogen and hydrogen isotope applications. As early as the 1970s, the Soviet Union had carried out the research and development of hydrogen barrier coating SCB glass coating, which was applied to the hydrogen penetration resistance of the TOPAZ space reactor container wall. SCB glass has good hydrogen barrier performance, but SiO 2 It will react with hydrogen at 300°C, causing embrittlement and crackin...

Claims

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Application Information

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IPC IPC(8): C23C16/40C23C14/08C23C14/35
Inventor 李帅张华何迪刘晓鹏杜淼郝雷张超吴云翼王树茂蒋利军
Owner GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
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