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Graphene resonator and manufacturing method thereof

A manufacturing method and graphene technology, applied in impedance networks, electrical components, etc., can solve problems such as pollution of suspended parts, difficulty in miniaturizing optical devices and optical paths, affecting the improvement of resonator quality factor, etc., and achieve easy integration. the effect of

Active Publication Date: 2015-06-17
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the optical devices and optical paths required by the optical method are difficult to achieve miniaturization
The electrical method needs to make electrodes on graphene, which can easily cause contamination of the suspended parts and affect the improvement of the quality factor of the resonator

Method used

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  • Graphene resonator and manufacturing method thereof
  • Graphene resonator and manufacturing method thereof

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Experimental program
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Effect test

Embodiment

[0034] Step 1: Select lithium niobate piezoelectric crystal as the substrate.

[0035] Step 2: Spin-coat photoresist, bake, expose, develop, vapor-deposit a metal film, and remove glue on the surface of the lithium niobate piezoelectric crystal in sequence to produce a surface acoustic wave generator.

[0036] Step 3: At a position about 3000 microns away from the surface acoustic wave generator and in the propagation direction of the surface acoustic wave, use photolithography and ion beam etching to process a groove with a depth of about 500 nanometers and a width of about 2 microns.

[0037] Step 4: growing a graphene film on a metal substrate by chemical vapor deposition. The specific implementation of preparing graphene by the vapor phase chemical deposition method belongs to the known technology, and will not be described in detail here.

[0038] Step 5: Paste the heat-peeling tape on the surface of the substrate with graphene, and then place it in a solution that can c...

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PUM

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Abstract

The invention provides a graphene resonator and a manufacturing method thereof. The graphene resonator comprises a substrate, a surface acoustic wave generator and graphene, wherein the surface acoustic wave generator is arranged on the surface of the substrate for generating surface acoustic waves; a groove is arranged on the substrate along the surface acoustic wave propagation direction; the graphene is arranged above the groove to form suspended graphene; and the suspended graphene can vibrate mechanically under effects of the surface acoustic waves. The graphene resonator and the manufacturing method thereof have the advantages that the surface acoustic waves are adopted to serve as an excitation source, the graphene serves as a mechanical vibration structure, the graphene resonator of the invention has smaller weight, higher resonance frequency and higher quality factor, integration is easy to realize, and the graphene resonator can be used for micro electro mechanical systems with tiny pressure sensing and tiny quality detection.

Description

technical field [0001] The invention relates to the field of micro / nano electromechanical devices and signal detection, in particular to a graphene resonator for electromechanical conversion based on surface acoustic wave excitation and a manufacturing method thereof. Background technique [0002] Technologies and devices based on microelectromechanical systems (MEMS) have developed rapidly in recent years. At present, MEMS products include pressure sensors, accelerometers, micro gyroscopes, ink nozzles and hard drive heads, and have been widely used in smart phones, electrical appliances, aerospace products and other fields. A mechanical resonator is a basic structure used to convert mechanical signals and electrical signals in MEMS. Mechanical resonators are generally micro-cantilever or micro-bridge structures processed by semiconductor materials using micro-nano processing technology. The resonator's own quality, resonance frequency and quality factor determine its det...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/15H03H3/02
Inventor 樊英民刘争晖许耿钊钟海舰黄增立徐科
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI