Multilayer film including first and second dielectric layers
A dielectric layer and multi-layer film technology, applied in the plating of superimposed layers, components of fixed capacitors, coatings, etc., to achieve the effects of low dielectric loss, high capacitance density value, and excellent insulating properties
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example 1
[0163] Copper foil (35 microns thick, 6.5 inches (16.5 cm) wide) is commercially available from Carl Schlenck AG (Barnsdorf, Germany) under the trade designation "ETP CDM 110". The surface roughness of the copper foil was measured using a Dektak 6M profilometer purchased from Veeco Instruments, Inc., (Plainview, NY). Take the average of three scans. The arithmetic mean of the absolute value of the surface measurement is 11 nanometers (nm), the root mean square is 14, the maximum valley depth is 46nm, the maximum peak height is 64nm, and the maximum profile height is 97nm.
[0164] Fix multiple copper foil samples on the figure 2 On the polymer transport film of the processing cartridge 106 of the apparatus 100 shown generally in FIG. The exposed surface of the copper foil was first plasma treated with argon gas at a flow rate of 500 standard cubic centimeters per minute (sccm) and a pressure of 300 mtorr (40 Pa). A plasma power of 600 W was used at a frequency of 400 kHz w...
example 2
[0172] For some of the samples prepared in Example 1, after the formation of the first and second dielectric layers, a layer of chromium bonding layer with a thickness of about 5 nm and a layer of copper with a thickness of about 15 nm were subsequently sputtered by DC sputtering seed layer. The structure was electroplated with copper to a thickness of approximately 12 microns.
[0173] Example
[0174] Copper foil samples (35 microns thick, 6.5 inches (16.5 cm) wide) available from Carl Schlenck AG under the trade designation "ETP CDM 110" were plasma treated and coated with a first dielectric as described in Example 1. layer. Thicknesses of 900 nm and 600 nm were targeted for the first dielectric layer to provide a dielectric layer comparable in thickness to the 800 nm dielectric layer thickness of Example 1 . To achieve a thickness of 600 nm, a drum speed of about 11.15 feet per minute (3.4 meters per minute) and a UV light exposure time of about 1.8 seconds was used. ...
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