A six-axis integrated micro-acceleration sensor and its manufacturing method
The technology of an acceleration sensor and its manufacturing method is applied in the direction of acceleration measurement using inertial force, microstructure technology, microstructure device, etc., which can solve the problems of inability to meet all-round measurement and precise control of penetrating weapons, and achieve good dynamic performance, Good high temperature resistance, low environmental noise effect
The technology of an acceleration sensor and its manufacturing method is applied in the direction of acceleration measurement using inertial force, microstructure technology, microstructure device, etc., which can solve the problems of inability to meet all-round measurement and precise control of penetrating weapons, and achieve good dynamic performance, Good high temperature resistance, low environmental noise effect
CN105021846BActive Publication Date: 2018-04-17佛山市顺德区新曹机械设备有限公司
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[0051] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0052] 1. Overall structure:
[0053] Such as figure 1 , figure 2 , image 3 As shown, it includes a sensitive chip 3 connected together by bonding, an upper cover 1 and a lower cover 2; the sensitive chip 3 is composed of four sensing units, and each sensing unit includes a structural support beam 4 , sensitive microbeam 5, inertial mass block 6 and fixed frame 7; described each inertial mass block 6 is connected by a structural support beam 4 and two sensitive microbeams 5 with the middle island part of fixed frame 7 to form a cantilever beam— Mass block system: the two microbeams 5 are symmetrically distributed between the inertial mass block 6 and the middle island of the fixed frame 7 with the structural support beam 4, and each sensitive microbeam 5 has a doping sensitive resistor 9 , 8 doped reference resistors 8 are evenly distributed on the oute...
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Abstract
The invention discloses a six-axis integrated micro-acceleration sensor and a manufacturing method thereof, comprising upper and lower cover plates and a sensing chip connected together by bonding. The sensing chip includes four beams drawn from the diagonal of the fixed outer frame and connected to the "island" in the middle, so that the "island" in the middle of the outer frame, the beams on the diagonal of the outer frame, and the outer frame form a whole— A fixed frame, each inertial sensing unit is composed of an inertial mass block, a structural support beam, and a sensitive micro-beam, each inertial mass block is trapezoidal, and the middle part of the upper bottom has a structural support beam extending to the lower bottom ; On both sides of the structural support beam, there are sensitive micro-beams connecting the upper bottom edge of the trapezoidal inertial mass block with the "island" in the middle of the fixed frame. Due to the small structure of the sensitive microbeam, the main stress will be concentrated when the sensitive chip is loaded, and it is easy to form a simple stress state of direct tension and direct compression, which is very conducive to decoupling between axes. The invention has a simple and compact structure and is easy to process.
Description
technical field [0001] The invention relates to the field of silicon micro-accelerometers, in particular to a piezoresistive six-axis high-range micro-accelerometer and a manufacturing method thereof. Background technique [0002] An acceleration sensor refers to a sensor that can measure the acceleration of an object's motion. Sensitivity, linearity, inter-axis coupling, response speed, response frequency bandwidth, stability, etc. are its main performance indicators. The micro-accelerometer is a kind of acceleration sensor and is an important part of the newly developed micro-electromechanical system (MEMS). With the development of the semiconductor industry, especially the development of MEMS technology, more and more high-performance, low-energy Micro-acceleration sensors with low power consumption and low price are gradually applied to all walks of life, constantly changing the way people live and work. As a special inertial measurement device, the high-range accelera...
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Patent Timeline
17 Apr 2018
Publication
CN105021846B
- IPC
- G01P15/12; B81B3/00; B81C1/00
- Inventors
- 杨川; 夏勇