Manufacture method for micro-electromechanical system (MEMS) lithium battery

A lithium battery and cell body technology, which is applied in the manufacturing field of MEMS lithium batteries, can solve the problems of gas product generation and unsatisfactory service life, etc., and achieve the effects of reducing charge transfer resistance, increasing body surface area, and simple preparation process

Active Publication Date: 2015-11-11
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Claims
  • Application Information

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Problems solved by technology

However, there are still some unsatisfactory aspects of fuel cells in supplementing fuel, generating gas products, and service life.

Method used

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  • Manufacture method for micro-electromechanical system (MEMS) lithium battery
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  • Manufacture method for micro-electromechanical system (MEMS) lithium battery

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preparation example Construction

[0054] The invention also discloses a method for preparing a chip battery, comprising the following steps:

[0055] Use semiconductor material as the substrate, evaporate a layer of Au / Cr by sputtering or electron beam, Au thickness is 100-500nm, preferably 200nm, Cr thickness is 10-50nm, preferably 20nm, use dry film (negative resist) as photoresist Perform photolithography, and then chemically etch to remove Au / Cr in other parts to form lead-out electrodes;

[0056] Deposit a layer of metal on the upper surface of the substrate, such as Au, Al, preferably aluminum, and then fix a layer of dry film on the upper surface of the substrate as a photoresist for photolithography to form a micro-column array pattern, and remove the column array by chemical etching Metals other than metals are then etched using a deep etching process to form a microcolumn array and the pool body of the battery's first housing;

[0057] Modifying and immobilizing nanomaterials on the surface of the m...

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Abstract

The invention discloses a manufacture method for a micro-electromechanical system (MEMS) lithium battery. The manufacture method comprises the steps of manufacturing a first shell and a second shell separately; and then packaging the first shell and the second shell together so as to form the battery. A cavity is formed in the first shell, and a positive electrode of the battery is integrated in the cavity. The second shell is made from a material the same as the material of the first shell. A cavity docking with the first shell is formed on the second shell. A negative electrode of the battery is integrated in the cavity. The manufacture method for the lithium battery is simple, can produce the lithium batteries in volume, lowers the production cost, and can greatly improve the consistency and reliability of battery preparation; the two dimensional structure of the electrode is changed into the three dimensional structure, so that the surface area of the electrode is greatly increased, the charge transfer resistance is reduced, the ion transference number is improved, and the energy density and power density of the battery are greatly improved; and the ion transference path can be shortened, and the battery charging time can be shortened.

Description

technical field [0001] The invention relates to the field of battery manufacturing, and more particularly to a method for manufacturing a MEMS lithium battery. Background technique [0002] Micro-Electro-Mechanical System (MEMS), also known as micro-electro-mechanical system, micro-system or micro-machine, is developed on the basis of microelectronic technology (semiconductor manufacturing technology), which integrates lithography, corrosion, thin film , LIGA, silicon micromachining, non-silicon micromachining and precision machining technologies such as high-tech electromechanical devices. [0003] MEMS integrates micro-sensors, micro-actuators, micro-mechanical structures, micro-power and micro-energy sources, signal processing and control circuits, high-performance electronic integrated devices, interfaces, and communications. It is a revolutionary new technology and is widely used in high-tech In the industry, its system size is several millimeters or even smaller, and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00H01M10/058
CPCY02E60/10Y02P70/50
Inventor 孙建海赵佩月刘昶马天军
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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