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Fabrication method of femtosecond laser direct writing of large-area two-dimensional metal photonic crystal structure

A metal photonic crystal and femtosecond laser technology, applied in laser welding equipment, metal processing equipment, welding equipment, etc., can solve the problems of complex preparation process, structural style and processing area limitation, long process time, etc. Simple, low cost, and the effect of overcoming complicated procedures

Inactive Publication Date: 2017-03-22
NANKAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Nevertheless, most of the above-mentioned two-dimensional metal photonic crystals are prepared using the traditional template-exposure-etching technology, which involves a relatively complicated preparation process and a long process time, and the prepared structural style and processing area are greatly affected. the limitations of

Method used

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  • Fabrication method of femtosecond laser direct writing of large-area two-dimensional metal photonic crystal structure
  • Fabrication method of femtosecond laser direct writing of large-area two-dimensional metal photonic crystal structure
  • Fabrication method of femtosecond laser direct writing of large-area two-dimensional metal photonic crystal structure

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] Such as figure 1 As shown, the horizontally linearly polarized laser 2 output from the femtosecond laser amplifier 1 with a repetition frequency of 1000 Hz, a pulse width of 50 femtoseconds, and a center wavelength of 800 nanometers is vertically incident on a YVO with a thickness of 1.26 mm after passing through a neutral attenuator 4 On the optical birefringent crystal 3, each incident pulse will be converted into two femtosecond laser pulses with the same central wavelength but the polarization directions are perpendicular to each other after exiting the crystal, wherein the polarization directions of the two beams are determined by the azimuth angle of the crystal It is determined that they are colinearly transmitted in space and the beam is focused by the same plano-convex cylindrical lens 4. By controlling the three-dimensional precision mobile platform 6, the surface of the sample material 5 to be processed is moved to a distance of 0-300 microns in front of the ...

Embodiment 2

[0045] On the basis of the light path in embodiment 1, adopt neutral attenuation sheet to be incident to YVO 4 The femtosecond laser power on the crystal is attenuated and the YVO 4 The azimuth rotation of the crystal is adjusted to 49° to obtain a double-pulse femtosecond laser beam with output linear polarization directions perpendicular to each other and a central wavelength of 800 nanometers. Before they are incident on the plano-convex cylindrical lens, the measured total laser power is 180 mW, and the sample target surface is adjusted to the focal point of the lens. figure 2 Shown are scanning electron micrographs of microstructures obtained on the sample surface when the sample scanning speed is 0.02 mm / s, and the magnifications are 10,000 and 50,000 times, respectively. It can be seen from the figure that at this time, the surface of the sample forms a dot-like structure distributed in a two-dimensional periodic array, and the corresponding spatial period and cell di...

Embodiment 3

[0047] In the operation of Example 2, the width of the scribe line was increased to 0.15 mm to obtain a dot-shaped microstructure distributed in a two-dimensional periodic array within a large area. image 3 It is a scanning electron micrograph at 5000 times magnification.

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Abstract

Provided is a method for preparing a two-dimensional metallic photonic crystal structure in large area through femtosecond laser direct writing. The invention provides a method and experiment device for preparing the periodically-distributed two-dimensional photonic crystal structure with the feature size being the sub-micron dimension in one step in the large area by focusing identical-wavelength double-pulse femtosecond laser on the surface of metal through a plano-convex cylindrical lens, and the identical-wavelength double-pulse femtosecond laser is obtained based on the spectrophotometry of birefringent crystals and has the features of collinear transmission, cross polarization and picosecond time delay. Two-dimensional periodic structure patterns can be effectively regulated and controlled by changing the energy and the number of pulses of input laser, the thicknesses and the azimuth angles of the birefringent crystals and the like. Through the combined design of different linear polarization directions and the variable time delay feature of two femtosecond laser pulses and focusing of the cylindrical lens, preparation of the two-dimensional metallic photonic crystal structure within the large area is achieved conveniently and quickly. The novel preparation method adopting the double-pulse femtosecond laser with cross polarization and variable time delay has potential important applications in the field of material micro-nano processing and preparation.

Description

technical field [0001] The invention relates to a method and a processing device for preparing a submicron-scale two-dimensional periodic structure by direct writing on the surface of a metal material with a femtosecond laser in a large area, wherein a cross-linearly polarized double pulse with collinear transmission in space and variable time delay is used The femtosecond laser is focused by a plano-convex cylindrical lens. This method and processing device belong to the field of ultrafast laser application and micro-nano processing, and may have important potential applications in the design and preparation of new metal nanophotonic devices in the future. Background technique [0002] With the development of nanotechnology, the design and preparation of various micro-scale structures and devices has become a research work that has been widely concerned by people. Improving and increasing the efficiency of nanostructure preparation technology has also become an important ch...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/352B23K26/362B23K26/60
CPCB23K26/352
Inventor 乔红贞杨建军秦晓勇王飞
Owner NANKAI UNIV
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