Cu-doped zno nano-columnar crystal thin film with room temperature ferromagnetism and preparation method thereof
A room temperature ferromagnetic, columnar crystal technology, applied in metal material coating process, vacuum evaporation coating, coating and other directions, to achieve the effect of excellent magnetoelectricity, simple process, easy to prepare in large quantities
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[0029] Zn 1-x Cu x The preparation method of the O target is not limited, for example, it can be prepared by a solid phase reaction method. In one example, Zn 1- x Cu x The preparation method of O target material includes: mixing CuO powder and ZnO powder, grinding, pressing and forming, and then sintering Zn by solid phase reaction method 1-x Cu x O(x=0.01~0.1) target material. In a more preferred example, Zn 1-x Cu x The preparation method of O target includes: (a) According to Zn 1-x Cu x Weigh CuO powder with purity ≥99.99% and ZnO powder with purity ≥99.99% in the atomic ratio set by O(x=0.01~0.1), mix these powders together, and put them in the grinding tank; (b) adopt improved type The horizontal ball mill (authorized announcement number: CN203235523U) fully grinds the CuO and ZnO powders in the grinding tank; (c) presses the ground CuO and ZnO mixed powders according to the target size; (d) Compressed Zn 1-x Cu x The O(x=0.01~0.1) green body is put into a sintering furn...
Embodiment 1
[0036] Example 1Zn 0.97 Cu 0.03 Preparation of O Nano-Columnar Crystal Film
[0037] (1) Preparation of ceramic targets for thin film deposition, including: (a) Using electronic balance, according to Zn 0.97 Cu 0.03 The atomic ratio of O molecular formula weighs 1.500g of CuO powder with purity ≥99.99%, weighs 49.618g of ZnO powder with purity ≥99.99%, and mix these powders together; (b) Put these powders in the agate grinding jar, And put agate balls in it; (c) Use an improved horizontal ball mill (authorized announcement number: CN203235523U) to fully grind the CuO and ZnO powders in the grinding tank, and the grinding time is ≥48h; (d) Take out and grind After the powder, separate the agate ball; (e) Press the ground CuO and ZnO mixed powder into a disc shape according to the target size; (f) Press the pressed Zn 0.97 Cu 0.03 The O body is put into the sintering furnace; (g) Fully sintered under air atmosphere and 1100℃, sintering time ≥24h;
[0038] (2) The treatment of the sub...
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