Hard mask composition and method of patterning using the same
A composition and hard mask technology, applied in the photoengraving process of the pattern surface, photosensitive materials and instruments for opto-mechanical equipment, etc., can solve the problem of difficulty in providing clear and fine patterns, and ensure the etching resistance. , to ensure the effect of flattened features
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Synthetic example 1
[0111] Friedel-Craft Acylation (substituent introduction reaction)
[0112] 20.2 grams (0.1 moles) of terephthaloyl dichloride, 37.8 grams (0.1 moles) of 9,9-bis(4-methoxyphenyl)-9H-fluorene and 232 grams of 1,2-dichloroethane were placed in the flask middle. Next, 13.2 g (0.1 mol) of aluminum chloride was slowly added to the solution, and the mixture was stirred at room temperature. Then, samples were taken from the polymerized reactant by measuring the weight average molecular weight of the polymerized reactant every hour, and when the weight average molecular weight reached 1,200 to 1,500, the reaction was terminated. When the reaction was terminated, methanol was added thereto, and the monomer remaining after the precipitate generated therein was filtered was removed by using water and methanol.
[0113] Fluorination
[0114] 2.5 g (4.5 mmol) of the compound obtained from the substituent introduction reaction, 2.2 g (9 mmol) of 4-tert-butyl-2,6-dimethylphenylsulfur trif...
Synthetic example 2
[0118] Friedel-Crafts acylation (substituent introduction reaction)
[0119] 20.2 grams (0.1 moles) of terephthaloyl dichloride, 37.8 grams (0.1 moles) of 9,9-bis(4-methoxyphenyl)-9H-fluorene and 232 grams of 1,2-dichloroethane were placed in the flask middle. Next, 13.2 g (0.1 mol) of aluminum chloride was slowly added to the solution, and the mixture was stirred at room temperature. Then, samples were taken from the polymerized reactant by measuring the weight average molecular weight of the polymerized reactant every hour, and when the weight average molecular weight was 1,200 to 1,500, the reaction was terminated. When the reaction was terminated, monomers remaining after the precipitate generated therein was filtered were removed with water and methanol.
[0120] Arylation (introduction reaction of aromatic groups)
[0121] 2 g of 2-bromonaphthalene were dissolved in 10 ml of tetrahydrofuran, and the solution was cooled to -78°C. Next, 2.2 ml of n-BuLi (2.5 molar conc...
Synthetic example 3
[0125] Friedel-Crafts acylation (substituent introduction reaction)
[0126] According to the same method as Example 1, change to use 20.2 grams (0.1 moles) of phthaloyl dichloride, 11.6 grams (0.05 moles) of 4-methoxypyrene, 7.9 grams (0.05 moles) of methoxynaphthalene, 157 grams of 1 , 2-dichloroethane and 13.2 grams (0.1 mol) of aluminum chloride to synthesize the compound.
[0127] Fluorination
[0128] According to the same method as in Example 1, by using 2 g of the compound obtained from the substituent introduction reaction, 2.5 g (10 mmol) of 4-tert-butyl-2,6-dimethylphenylsulfur trifluoride, 3 ml HF-pyridine and 20 ml of dichloromethane obtained a compound represented by the following chemical formula C (polymer weight average molecular weight = 2,500).
[0129] [chemical formula C]
[0130]
PUM
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