Hard anti-reflection composite film type optical window and preparation method thereof

Abstract

The invention discloses a hard anti-reflection composite film type optical window and a preparation method thereof, and belongs to the technical field of manufacturing of optical part films. The optical window is provided with a Sub / HL film system, wherein Sub is a base of the optical window; H is a germanium combined layer; L is a diamond-like film. According to the hard anti-reflection composite film type optical window, the germanium combined layer is introduced between the optical window and the diamond-like film, thus the problems of mismatching of the diamond-like film and a thermal expansions system of the optical window and poor adhesiveness can be solved, and the deposition of the diamond-like film on the surface of the optical window can be achieved; the combined layer and the diamond-like film are combined, so that the transmissivity of the optical window can be improved, the resistance of the surface of the window to sand corrosion and rain corrosion can be improved, and meanwhile, the environmental reliability of a film layer on the surface of the optical window can be improved, and as a result, the service life of the optical window can be prolonged.

Description

technical field [0001] The invention belongs to the technical field of thin film manufacturing of optical parts, and in particular relates to a hard antireflection composite film optical window and a preparation method thereof. Background technique [0002] In the field application environment such as sea surface and space, the optical window should not only have good optical characteristics, but also have high hardness, corrosion resistance, impact resistance and other characteristics. Common optical window materials can be ZnS, ZnSe, Si, SiO 2 , AS 2 S 3 , KCl, CaF 2 etc. Its shape can be flat plate, spherical crown and other shapes. The operating environment of the optical window is harsh, and it is often eroded by wind, sand and rain. The surface of the optical window eroded by rain and sand will cause serious light scattering to the incident light, which will inevitably reduce the transmittance of the optical window, and seriously cause the optical system to lose T...

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Problems solved by technology

[0006] The purpose of the present invention is to provide a hard anti-reflection composite film optical window, thereby solving the problems of the thermal expansion coefficient mismatch and poor adhesion between the diamond-like film and the optical window in the prior art, and realizing efficient anti-reflection for the optical window. And improve the anti-sand erosion and rain erosion ability of the optical window surface