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Short-wave-infrared multichannel integrated optical spectrum assembly

A short-wave infrared, multi-channel technology, used in spectrometry/spectrophotometry/monochromator, spectrum survey, optical radiation measurement, etc. reliability and other issues to achieve the effect of improving the signal-to-noise ratio

Active Publication Date: 2016-03-02
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Its advantage is low cost, and its disadvantage is that there are moving parts inside the instrument, which affects the long-term stability and reliability of the instrument
(2) Using InGaAs linear focal plane detector components, gratings, mirrors, etc., the instrument is an all-solid-state spectroscopic system, its stability and reliability are greatly improved, and the integration level of the instrument needs to be further improved
[0003] With the improvement of optical design capabilities and processing capabilities, it is possible to realize a single-chip multi-channel digital optical splitter in the 0.9μm-1.7μm band with the existing technology

Method used

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Embodiment 1

[0042] This embodiment is a 128×1 short-wave infrared multi-channel integrated spectrum component.

[0043] according to figure 1 As shown, the aspect ratio of the photosensitive element of the back-illuminated InGaAs linear chip is 10:1, the center distance between p1 and p2 is 50 μm, the length of the photosensitive element is 500 μm, the chip size is 256×1, and the spectral response range is 0.9 μm to 1.7 μm. A 256×1 InGaAs linear array chip 1 and a 256×1 readout circuit 2 are interconnected through In-column flip-bonding to form a 256×1 back-illuminated focal plane module.

[0044] according to figure 2 As shown, the multi-channel digital spectrometer 6 is a 128×1-channel short-wave infrared spectrometer, and 128 spectral channels are discontinuously distributed on a sapphire substrate with a thickness of 300 μm to 500 μm within a spectral range of 0.9 μm to 1.7 μm. , the center distance between f1 and f2 is 100μm, the bandwidth of each spectral channel is 3nm, the tran...

Embodiment 2

[0047] This embodiment is a 128×1 short-wave infrared multi-channel integrated spectrum component.

[0048] according to figure 1 As shown, the aspect ratio of the photosensitive element of the back-illuminated InGaAs linear chip is 20:1, the center distance between p1 and p2 is 50 μm, the length of the photosensitive element is 1000 μm, the chip size is 256×1, and the spectral response range is 0.9 μm to 1.7 μm. A 256×1 InGaAs linear array chip 1 and a 256×1 readout circuit 2 are interconnected through In-column flip-bonding to form a 256×1 back-illuminated focal plane module.

[0049] according to figure 2As shown, the multi-channel digital spectrometer 6 is a 128×1-channel short-wave infrared spectrometer, and 128 spectral channels are discontinuously distributed on a sapphire substrate with a thickness of 300 μm to 500 μm within a spectral range of 0.9 μm to 1.7 μm. , the center distance between f1 and f2 is 100μm, the bandwidth of each spectral channel is 3nm, the tran...

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Abstract

The present invention discloses a short-wave-infrared multichannel integrated optical spectrum assembly. The short-wave-infrared multichannel integrated optical spectrum assembly comprises a high length-width ratio InGaAs alignment photosensitive chip, a reading circuit, a transition plate electrode, a measurement resistor, a semiconductor refrigerator, a multichannel digital optical splitter, a window, a metal tube casing and a cover plate. The multichannel digital optical splitter is taken as the splitting element of a micro spectrometer, directly welded and fixed on the high length-width ratio InGaAs alignment photosensitive chip through edge metallization, and integrated in a detector assembly. The short-wave-infrared multichannel integrated optical spectrum assembly is characterized in that: the photosensitive component of an InGaAs alignment photosensitive chip has a high length-width ratio structure so as to improve the signal to noise ratios of a spectrum test; a multichannel digital optical splitter is able to realize fine control of the spectrum on single substrate and restrain spectrum noise in each channel, crosstalk among channels and stray light outside the channels; and a detector assembly is able to realize detection of a plurality of spectrum channels so that the structure of a micro spectrometer is simplified, the reliability and the stability of an instrument is improved and the weight of the instrument is mitigated.

Description

technical field [0001] The invention relates to an InGaAs detector component, in particular to an InGaAs detector component integrated with a multi-channel digital beam splitter used in a miniature spectrometer. Background technique [0002] Miniature spectrometers have a wide range of application requirements in agriculture, food, industry and other fields. They are ideal instruments for on-site quality inspection and on-line inspection. . The short-wave infrared InGaAs detector has the advantages of uncooled room temperature operation, high detection rate and good uniformity in the 0.9 μm ~ 1.7 μm band, and has become an ideal choice for miniature spectrometers. Micro-spectrometers based on short-wave infrared InGaAs detectors usually adopt the following two technical solutions: (1) use InGaAs unit detectors, and scanning stepping devices, gratings, mirrors, etc. to achieve spectral measurement. Its advantage is low cost, and its disadvantage is that there are moving par...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/28G01J3/02
Inventor 邵秀梅周东平方家熊程吉凤徐勤飞黄松垒陈郁
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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