Three-dimensional metal grating manufacturing method

Abstract

The invention discloses a method for manufacturing a three-dimensional metal grating, which comprises the steps of: forming a plurality of stoppers arranged at intervals on an epitaxial wafer; forming a three-dimensional metal structure between the stoppers; peeling and removing the stoppers, so that A three-dimensional metal grating is formed on the epitaxial wafer. The invention uses surface plasmons to bind energy on the metal surface, and can enhance the electric field intensity parallel to the growth direction of the quantum well material in the near-field range, and uses the principle of thermal evaporation to prepare a three-dimensional metal grating, thereby improving the multi-quantum The coupling efficiency of the trap to light improves the detection sensitivity of the infrared detector, thereby promoting the development of the infrared detector system to the goal of miniaturization, portability and high sensitivity.

Description

technical field [0001] The invention belongs to the fields of micro-nano processing and photoelectric sensors, and in particular relates to a manufacturing method of a three-dimensional metal grating. Background technique [0002] Quantum Well Infrared Photodetector (QWIP for short) can artificially tailor the width of the band gap by changing the width of the potential well and the height of the potential barrier to achieve controllable response wavelength. It is used in national defense detection, mineral resource detection, forest fire prevention, industrial It has a wide range of application prospects in the fields of monitoring and medical and health, and has become a research hotspot in the field of infrared detectors in recent years. [0003] However, according to the restriction of the quantum well subband transition selection rule, incident photons perpendicular to the quantum well material cannot excite the ground-state electronic transitions in the QWIP quantum we...

AI Technical Summary

Problems solved by technology

Compared with the direct incidence method, the coupling efficiency is improved a lot, but this method will sacrifice part of the quantum well

[0004] In addition, the traditional surface periodic structure uses a two-dimensional structured grating. The incident light is reflected and diffracted to achieve light absorption. The light only passes through the absorption path twice in the quantum well layer, so the light absorption efficiency of the two-dimensional grating is still not high. high

In recent years, with the development of GaN / AlGaN multi-quantum well infrared detectors, due to the limitation of the polarization and defects of the GaN / AlGaN multi-quantum well material system, the probability of electron transition and transport is low, and the coupling efficiency of the traditional two-dimensional grating Some limitations have been shown, and the need for higher coupling efficiency gratings is more urgent

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