Drop array chip and preparation method thereof
An array chip and droplet technology, applied in the field of biochemical analysis, can solve the problems of high cost, unstable flow rate, complex processing technology, etc., and achieve the effects of accurate and efficient morphology, excellent performance and simple operation.
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Embodiment 1
[0055] droplet array chip
[0056] A droplet array chip, comprising: a substrate; the substrate has hydrophilic regions and hydrophobic regions arranged alternately to form a hydrophilic-hydrophobic array;
[0057] The hydrophilic region is formed by oxygen plasma treatment; the hydrophobic region is formed by physical volatilization deposition of perfluorodecyltriethoxysilane; the hydrophilic and hydrophobic array is a planar droplet array; the hydrophilic region is A square array with a side length of 200um and a pitch of 400um;
[0058] The base material is single crystal silicon.
[0059] Preparation method of droplet array chip
[0060] A method for preparing a droplet array chip, comprising the following steps:
[0061] 1) Take a substrate and clean its surface to remove surface organic and inorganic impurities; the specific cleaning steps are: sequentially ultrasonically clean in acetone, absolute ethanol and ultrapure water, blow dry with nitrogen and put it in an...
Embodiment 2
[0069] droplet array chip
[0070] Except that the shapes of the hydrophilic and hydrophobic regions are different and the positions of the hydrophilic and hydrophobic regions are replaced with each other, the rest are the same as in Example 1; the hydrophobic regions of the droplet array chip in this embodiment are circular, with a diameter of 20um and a pitch of 200um. array arrangement.
[0071] Preparation method of droplet array chip
[0072] Except that the mask plate in step b is arranged in a circular array with a diameter of 20 um and a pitch of 200 um, and a circular concave array pattern surrounded by photoresist is obtained by developing, the rest is the same as that of embodiment 1.
[0073] The above-mentioned droplet array chip is immersed in hexadecene, and the droplet array formed by hexadecene droplets is obtained after taking it out, as shown in image 3 shown.
Embodiment 3
[0075] droplet array chip
[0076] Except that the shapes of the hydrophilic and hydrophobic regions are different and the positions of the hydrophilic and hydrophobic regions are replaced with each other, the rest are the same as in Embodiment 1; the hydrophobic region of the droplet array chip in this embodiment is a square array with a side length of 100um and a pitch of 200um;
[0077] Preparation method of droplet array chip
[0078] A method for preparing a droplet array chip, comprising the following steps:
[0079] 1) Take a substrate and clean its surface to remove surface organic and inorganic impurities; the specific cleaning steps are: sequentially ultrasonically clean in acetone, absolute ethanol and ultrapure water, blow dry with nitrogen and put it in an oven for drying. Remove the water vapor attached to the substrate itself; the substrate material is monocrystalline silicon;
[0080] 2) Treat the substrate to obtain the affinity array
[0081] a. Carry ...
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