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Method for improving corrosion resistance of neodymium iron boron magnet by using atomic layer deposition

An atomic layer deposition and neodymium-iron-boron technology, which is applied in coating, metal material coating process, gaseous chemical plating, etc., can solve the problem of high water vapor transmission rate

Inactive Publication Date: 2016-04-20
HUNAN INSTITUTE OF SCIENCE AND TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The film deposited by this technology has the characteristics of no pinholes, which can solve the problem of high water vapor transmission rate due to the microporous structure inside traditional ceramic materials and even organic materials.

Method used

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  • Method for improving corrosion resistance of neodymium iron boron magnet by using atomic layer deposition
  • Method for improving corrosion resistance of neodymium iron boron magnet by using atomic layer deposition

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Experimental program
Comparison scheme
Effect test

Embodiment

[0021] The base material is sintered NdFeB permanent magnet, (sample source: market purchase), sample size: 4cm×4cm×0.25cm.

[0022] 1) Grinding, polishing, cleaning and drying the surface of the sintered NdFeB magnet;

[0023] 2) Put the pretreated sintered NdFeB magnet into the vacuum chamber of the atomic layer deposition equipment;

[0024] 3) Vacuumize the cavity and preheat the magnet. The heat treatment temperature is 180°C. The heating method is combined with hot nitrogen and radiation heating;

[0025] 4) After the sample is heated to the target temperature, the precursor is pulsed into the cavity to deposit Al2O3. ,Such as figure 1 As shown, as time progresses, pulse trimethylaluminum vapor is first introduced into the cavity, the pulse time is 1s, and then pulsed nitrogen gas is injected into the cavity for cleaning, the pulse time is 1.5s, and the flow rate is 5000sccm, and then the cavity is passed Inject pulse water vapor, the pulse time is 1.5s, and then pass...

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Abstract

The invention discloses a method for improving corrosion resistance of a neodymium iron boron magnet, and uses an atomic layer deposition technology for forming corrosion-resistant nanofilm-titanium dioxide on the surface of the neodymium iron boron magnet. The method comprises the following steps: 1) the surface, to be processed, of the sintered neodymium iron boron magnet is grinded, polished, cleaned and predried; 2) the pretreated sintered neodymium iron boron magnet is put in a fixed stand of atomic layer deposition equipment for preheating; 3) a layer of aluminum oxide is deposited on the surface of the neodymium iron boron magnet; and 4) a layer of titanium dioxide is deposited on the surface of the neodymium iron boron magnet. The atomic layer deposition technology generates no such waste water as acid and alkali in the preparation process, is simple in technological process, and is an environment-friendly preparation method.

Description

technical field [0001] The invention belongs to the field of surface anticorrosion of NdFeB permanent magnet materials, and more specifically relates to an anticorrosion NdFeB permanent magnet material coating material and a processing technology. Background technique [0002] NdFeB rare earth permanent magnet is the third generation rare earth permanent magnet material after samarium cobalt rare earth permanent magnet, which has high remanence, high coercive force and high magnetic energy product. The development of NdFeB permanent magnet permanent magnet materials has greatly promoted the progress of science and technology. NdFeB magnets are indispensable functional materials in the fields of electronic products, automobile industry, medical equipment, energy transportation, wind power generation and so on. [0003] The impeller of the direct-drive permanent magnet wind turbine directly drives the generator, which has a simple structure and reliable operation. However, t...

Claims

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Application Information

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IPC IPC(8): C23C16/455C23C16/40
CPCC23C16/45529C23C16/403C23C16/405
Inventor 郭洪澈甘安平刘红霞刘玉华徐诚周洪波
Owner HUNAN INSTITUTE OF SCIENCE AND TECHNOLOGY