Imaging spectrometer on the basis of etched diffraction grating

An imaging spectrometer and diffraction grating technology, which is applied in the field of imaging spectrometers, can solve problems such as the scheme design of integrated planar optical waveguide devices that are not used in remote sensing imaging, and achieve the effects of strong system function expansion, enhanced stability, and reduced weight and volume.

Active Publication Date: 2016-05-04
ZHEJIANG UNIV
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Problems solved by technology

There are also a wide variety of chip spectrometers reported, but the main applications are concentrated in biosensing, coherent tomography an

Method used

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  • Imaging spectrometer on the basis of etched diffraction grating
  • Imaging spectrometer on the basis of etched diffraction grating
  • Imaging spectrometer on the basis of etched diffraction grating

Examples

Experimental program
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Example Embodiment

[0063] Example 1:

[0064] Such as image 3 It is a schematic diagram of the first embodiment of the present invention. The imaging system 1 images the ground detection area to a slit, and is limited by the slit to obtain a column of light corresponding to 128 pixels that is coupled into the input waveguide array of the chip, and the coupling loss can be controlled Within 1dB. By controlling the tunable optical attenuator array on the input waveguide, the light intensity signals of the 128 output waveguide arrays corresponding to each input channel can be read sequentially, that is, the spectral information of each spatial point.

Example Embodiment

[0065] Example 2:

[0066] For the second embodiment, the imaging system is limited by the slit to obtain a column of images corresponding to 128 pixels. The obtained image passes through the optical switch array 10 composed of 128 micromirrors and then is focused to the taper coupling structure shown in 4 through the cylindrical mirror in the direction perpendicular to the chip plane, and finally leads the light into 128 such as Figure 5 Large cross-section SOI waveguide shown. By controlling the micromirror light switch to turn on the switches of different pixels in turn, only the waveguide corresponding to this pixel has light entering and being split.

[0067] When the imaging spectrometer requires a higher spatial resolution, which results in a row of push-broom imaging that requires more pixels to work, such as a row of 1024 pixels, the two embodiments of the present invention can be extended to 8 above-mentioned spectroscopic systems Evenly distributed on the chip in an ar...

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Abstract

The present invention discloses an imaging spectrometer on the basis of an etched diffraction grating. The imaging spectrometer comprises an imaging system and an integrated chip mainly integrating a first splitting system or a second splitting system. After an input light is imaged to a space light through the imaging system, the space light is subjected to light splitting output through the first splitting system, or the space light is subjected to light splitting output through the second splitting system after the space light is processed or focused through a digital micromirror array light switch and a cylindrical mirror. According to the invention, the weight and the volume of the imaging spectrometer are greatly mitigated, the integrated level is high and the stability of the system is enhanced; and moreover, the imaging spectrometer on the basis of etched diffraction grating has a wide-range spectrum and good system function expansibility and is applicable to the remote sensing detection of a small unmanned aerial vehicle.

Description

technical field [0001] The invention relates to an imaging spectrometer, in particular to an imaging spectrometer based on an etching diffraction grating. Background technique [0002] Optical instruments have always been an important part of space exploration and remote sensing of the Earth. Imaging spectrometers on remote sensing satellites and aircraft are important instruments for observing the atmosphere, oceans, and land. [0003] The imaging spectrometer is divided into a telescope imaging system and a spectrometer system. The relatively mature and good-performance spectroscopic spectrometers include prisms, grating dispersion spectrometers and Fourier transform spectrometers. They are all composed of discrete lenses, spectroscopic elements and detectors. The volume and weight are relatively large, the cost is high, and there are high requirements for component fixing, and it cannot be integrated with the signal acquisition system. This is a burden both on-board and ...

Claims

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Application Information

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IPC IPC(8): G01J3/28
CPCG01J3/2823G01J3/2846
Inventor 何建军杨旻岳李明宇
Owner ZHEJIANG UNIV
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