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Uniform film-forming fine-grained nickel alloy rotating target and its hot extrusion optimization preparation method

A technology of rotating target and hot extrusion, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of nickel alloy rotating target, eliminate delamination phenomenon, improve target material Utilization, the effect of internal tissue uniformity

Active Publication Date: 2018-06-19
GEMCH MATERIAL TECH SUZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In the prior art, there is no applicable nickel alloy rotating target technology

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Ni with a purity of 99.99% and Cr with a purity of 99.95% are used as raw materials. Among the raw materials, the Cr content is 20%. The raw materials with a good ratio are smelted into a high-purity nickel-chromium alloy ingot in a vacuum induction melting furnace. The size of the alloy ingot is It is 260mm in diameter and 500mm in length; prepare the corresponding extrusion die according to the required size of the product and install it in the double-action reverse extrusion machine; heat the smelted nickel-chromium alloy ingot in a circular tube heater for 1.5 hours, and heat The temperature is 1300°C; the heated semi-molten solid nickel-chromium alloy ingot enters the extruder directly through the transmission track, the extrusion temperature is set at 1150°C, and the extrusion speed is controlled at 15cm / min. Under the joint action, the nickel-chromium alloy tube target is slowly extruded from the exit of the extruder, and the flow of the internal material is incre...

Embodiment 2

[0027]Nickel with a purity of 99.99% and copper with a purity of 99.99% are used as raw materials. Among the raw materials, the copper content is 35%. The raw materials with a good ratio are smelted into a high-purity nickel-chromium alloy ingot in a vacuum induction melting furnace to obtain nickel-copper The size of the alloy ingot is 251mm in diameter and 500mm in length; prepare the corresponding extrusion die according to the required size of the product and install it in the double-acting reverse extrusion machine; heat the smelted nickel-copper alloy ingot in a circular tube heater for 1 hours, the heating temperature is 950°C; after entering the extruder, the extrusion temperature is set to 900°C, the extrusion speed is 20cm / min, under the joint action of the extruder and the mold, the nickel-copper alloy tube target exits the extruder Extrude slowly at the place, and increase the flow of internal materials during the extrusion process, so that the internal structure of...

Embodiment 3

[0029] Nickel with a purity of 99.99% and vanadium with a purity of 99.95% are used as raw materials. Among the raw materials, the vanadium content is 7%. The raw materials with a good ratio are melted into high-purity nickel-chromium alloy ingots in a vacuum induction melting furnace to obtain nickel-vanadium The size of the alloy ingot is 250mm in diameter and 300mm in length; prepare the corresponding extrusion die according to the required size of the product and install it in the double-action reverse extrusion machine; heat the smelted nickel-vanadium alloy ingot in a circular tube heater for 2 Hours, the heating temperature is 1400°C; after entering the extruder, set the extrusion temperature to 1200°C, and the extrusion speed to 30cm / min. Extrude slowly at the place, and increase the flow of internal materials during the extrusion process, so that the internal structure of the nickel-vanadium alloy is relatively uniform, and there is no obvious layering phenomenon; afte...

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Abstract

Provided is a hot extrusion optimizing preparation method of a fine grain nickel alloy rotary target capable of achieving even film forming. Nickel with the purity larger than or equal to 99.99% and other element metal with the purity larger than or equal to 99.95% are adopted as alloy raw materials to be molten into a high-purity nickel alloy ingot; and the high-purity nickel alloy ingot is placed in an extrusion die placed in a double-acting backward extrusion machine after being heated by one to two hours, the high-purity nickel alloy ingot is subjected to hot extrusion to form a semi-finished nickel alloy pipe target, the total deformation in the extruding process is larger than 80%, and recrystallization annealing is carried out after cooling. The structure in the nickel alloy is more even, the obvious layering phenomenon is eliminated, the alloy target is high in finished product rate, fine in grain, even in inner structure and more stable in sputtering, film forming is even when the target is used, a high-quality thin film with even thickness can be obtained, and the utilization rate of the target is increased.

Description

technical field [0001] The invention relates to the field, the coating technology of C23C sputtering method in the IPC classification, which belongs to the field of new material target processing, especially the fine-grained nickel alloy rotating target with uniform film formation and its hot extrusion optimization preparation method. Background technique [0002] Nickel alloy has excellent comprehensive properties and is an indispensable metal material. Nickel alloy has unique physical and mechanical properties, strong corrosion resistance, can withstand the erosion of various media in the range of 200-1090 °C, has good high-temperature and low-temperature performance, and has been widely used in many fields such as petrochemical, aerospace, marine development, etc. Widely used, the nickel alloy materials required by aero-engines account for more than half of the overall structural materials. Nickel-based superalloys and nickel-based corrosion-resistant alloys are typical ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C22C19/03C22C19/05C22F1/10
CPCC22C19/03C22C19/058C22F1/10C23C14/3414
Inventor 曹兴民庄志杰顾宗慧
Owner GEMCH MATERIAL TECH SUZHOU
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